Abstract

An optical inspection system has been developed that detects parameter fluctuations in an optical disk pregroove structure (groove pitch, depth, and width). This optical system was devised using a laser diffraction phenomenon. Groove parameters are measured and calculated from diffracted-light intensity ratios; the groove width is calculated from the second-order diffracted-light intensity ratio to that for the first order. The groove depth is given from the first-order ratio to the zeroth-order light intensity. In addition to this groove parameter inspection, this system is capable of groove defect detection using a spatial filter whose passband is designed to be between the zeroth- and the first-order diffracted-light areas.

© 1984 Optical Society of America

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References

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  1. K. Bulthuls et al. “Ten Billion Bits on a Disk,” IEEE Spectrum 8, 26 (1979).
  2. A. Iwamoto, H. Sekizawa, “Rotation-, Shift-, and Magnification-Insensitive Periodic-Pattern-Defects Optical Detection System,” Appl. Opt. 19, 1196 (1980).
    [CrossRef] [PubMed]
  3. A. Papoulis, Systems and Transforms with Application in Optics (McGraw-Hill, New York, 1968).

1980 (1)

1979 (1)

K. Bulthuls et al. “Ten Billion Bits on a Disk,” IEEE Spectrum 8, 26 (1979).

Appl. Opt. (1)

IEEE Spectrum (1)

K. Bulthuls et al. “Ten Billion Bits on a Disk,” IEEE Spectrum 8, 26 (1979).

Other (1)

A. Papoulis, Systems and Transforms with Application in Optics (McGraw-Hill, New York, 1968).

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