Abstract

Successive evaporation of two correctly chosen elements now make possible highly efficient X–UV mirrors. However, good results depend on two points: First we must know the manufacturing tolerances; these depend strongly on the spectral range and the refractive index of materials used for the coating. The other important parameter is the roughness of each interface, which can result in significant losses in the reflectivity of the mirrors. This paper examines both points. Specular reflectance measurements at 0.159 nm are very sensitive to the roughness of each layer. To demonstrate this sensitivity we develop a method of calculation of this reflectance taking into account the roughness of each interface of the multilayer.

© 1984 Optical Society of America

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  1. W. Deubner, Ann. Phys. Leipzig 5, 261 (1930).
    [CrossRef]
  2. T. W. Barbee, in Proceedings, Topical Conference on Low Energy X-Ray Diagnostics (American Institute of Physics, New York, 1980).
  3. J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).
  4. A. V. Vinogradov, B. Ya. Zeldovich, Appl. Opt. 16, 89 (1977).
    [CrossRef] [PubMed]
  5. P. Croce, J. Opt. (Paris) 12, 163 (1981).
    [CrossRef]
  6. Y. Lepetre, L. Nevot, B. Vidal, in Proceedings, Fourth International Conference on Plasmas, CIP 82, Nice, France13–17 Sept. 1982.
  7. L. G. Parratt, Phys. Rev. 95, 359 (1954).
    [CrossRef]
  8. A. E. Rosenbluth, P. Lee, Appl. Phys. Lett. 40, 466 (1982).
    [CrossRef]
  9. R. Marmoret, J. M. Andre, Appl. Opt. 22, 17 (1983).
    [CrossRef] [PubMed]
  10. B. L. Henke et al.. At. Data Nucl. Data Tables 27, 1 (1982).
    [CrossRef]
  11. J. C. Rife, J. F. Osantowski, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 103 (1981).
  12. B. Vidal, A. Fornier, E. Pelletier, Appl. Opt. 17, 1038 (1978).
    [CrossRef] [PubMed]
  13. P. Beckmann, A. Spizzichino, The scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, New York, 1963).
  14. J. M. Eastman, “Scattering by ALL Dielectric Multilayer Band-Pass Filters and Mirrors for Lasers,” Phys. Thin Films 10, 000 (1978).
  15. C. K. Carniglia, Opt. Eng. 18, 104 (March–April1979).
    [CrossRef]
  16. P. Croce, J. Opt. (Paris) 10, 141 (1979).
    [CrossRef]
  17. P. Croce, L. Prod’homme, Nouv. Rev. Opt. 7, 121 (1976).
    [CrossRef]
  18. L. Nevot, P. Croce, Rev. Phys. Appl. 15, 761 (1980).
    [CrossRef]
  19. P. Bousquet, F. Flory, P. Roche, J. Opt. Soc. Am. 71, 1115 (1981).
    [CrossRef]
  20. A. Roger, Opt. Acta 30, 575 (1983).
    [CrossRef]
  21. J. H. Apfel, Appl. Opt. 15, 2339 (1976).
    [CrossRef] [PubMed]
  22. A. K. Hagenlocher, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 118 (1981).

1983

1982

A. E. Rosenbluth, P. Lee, Appl. Phys. Lett. 40, 466 (1982).
[CrossRef]

B. L. Henke et al.. At. Data Nucl. Data Tables 27, 1 (1982).
[CrossRef]

1981

J. C. Rife, J. F. Osantowski, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 103 (1981).

P. Croce, J. Opt. (Paris) 12, 163 (1981).
[CrossRef]

P. Bousquet, F. Flory, P. Roche, J. Opt. Soc. Am. 71, 1115 (1981).
[CrossRef]

A. K. Hagenlocher, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 118 (1981).

J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).

1980

L. Nevot, P. Croce, Rev. Phys. Appl. 15, 761 (1980).
[CrossRef]

1979

C. K. Carniglia, Opt. Eng. 18, 104 (March–April1979).
[CrossRef]

P. Croce, J. Opt. (Paris) 10, 141 (1979).
[CrossRef]

1978

J. M. Eastman, “Scattering by ALL Dielectric Multilayer Band-Pass Filters and Mirrors for Lasers,” Phys. Thin Films 10, 000 (1978).

B. Vidal, A. Fornier, E. Pelletier, Appl. Opt. 17, 1038 (1978).
[CrossRef] [PubMed]

1977

1976

J. H. Apfel, Appl. Opt. 15, 2339 (1976).
[CrossRef] [PubMed]

P. Croce, L. Prod’homme, Nouv. Rev. Opt. 7, 121 (1976).
[CrossRef]

1954

L. G. Parratt, Phys. Rev. 95, 359 (1954).
[CrossRef]

1930

W. Deubner, Ann. Phys. Leipzig 5, 261 (1930).
[CrossRef]

Andre, J. M.

Apfel, J. H.

Barbee, T. W.

T. W. Barbee, in Proceedings, Topical Conference on Low Energy X-Ray Diagnostics (American Institute of Physics, New York, 1980).

Beckmann, P.

P. Beckmann, A. Spizzichino, The scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, New York, 1963).

Bousquet, P.

Carniglia, C. K.

C. K. Carniglia, Opt. Eng. 18, 104 (March–April1979).
[CrossRef]

Croce, P.

P. Croce, J. Opt. (Paris) 12, 163 (1981).
[CrossRef]

L. Nevot, P. Croce, Rev. Phys. Appl. 15, 761 (1980).
[CrossRef]

P. Croce, J. Opt. (Paris) 10, 141 (1979).
[CrossRef]

P. Croce, L. Prod’homme, Nouv. Rev. Opt. 7, 121 (1976).
[CrossRef]

Deubner, W.

W. Deubner, Ann. Phys. Leipzig 5, 261 (1930).
[CrossRef]

Eastman, J. M.

J. M. Eastman, “Scattering by ALL Dielectric Multilayer Band-Pass Filters and Mirrors for Lasers,” Phys. Thin Films 10, 000 (1978).

Flory, F.

Fornier, A.

Hagenlocher, A. K.

A. K. Hagenlocher, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 118 (1981).

Henke, B. L.

B. L. Henke et al.. At. Data Nucl. Data Tables 27, 1 (1982).
[CrossRef]

Henry, J. P.

J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).

Lee, P.

A. E. Rosenbluth, P. Lee, Appl. Phys. Lett. 40, 466 (1982).
[CrossRef]

Lepetre, Y.

Y. Lepetre, L. Nevot, B. Vidal, in Proceedings, Fourth International Conference on Plasmas, CIP 82, Nice, France13–17 Sept. 1982.

Marmoret, R.

Nevot, L.

L. Nevot, P. Croce, Rev. Phys. Appl. 15, 761 (1980).
[CrossRef]

Y. Lepetre, L. Nevot, B. Vidal, in Proceedings, Fourth International Conference on Plasmas, CIP 82, Nice, France13–17 Sept. 1982.

Osantowski, J. F.

J. C. Rife, J. F. Osantowski, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 103 (1981).

Parratt, L. G.

L. G. Parratt, Phys. Rev. 95, 359 (1954).
[CrossRef]

Pelletier, E.

Prod’homme, L.

P. Croce, L. Prod’homme, Nouv. Rev. Opt. 7, 121 (1976).
[CrossRef]

Rife, J. C.

J. C. Rife, J. F. Osantowski, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 103 (1981).

Roche, P.

Roger, A.

A. Roger, Opt. Acta 30, 575 (1983).
[CrossRef]

Rosenbluth, A. E.

A. E. Rosenbluth, P. Lee, Appl. Phys. Lett. 40, 466 (1982).
[CrossRef]

Spiller, E.

J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).

Spizzichino, A.

P. Beckmann, A. Spizzichino, The scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, New York, 1963).

Vidal, B.

B. Vidal, A. Fornier, E. Pelletier, Appl. Opt. 17, 1038 (1978).
[CrossRef] [PubMed]

Y. Lepetre, L. Nevot, B. Vidal, in Proceedings, Fourth International Conference on Plasmas, CIP 82, Nice, France13–17 Sept. 1982.

Vinogradov, A. V.

Weisskopf, M.

J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).

Zeldovich, B. Ya.

Ann. Phys. Leipzig

W. Deubner, Ann. Phys. Leipzig 5, 261 (1930).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

A. E. Rosenbluth, P. Lee, Appl. Phys. Lett. 40, 466 (1982).
[CrossRef]

At. Data Nucl. Data Tables

B. L. Henke et al.. At. Data Nucl. Data Tables 27, 1 (1982).
[CrossRef]

J. Opt. (Paris)

P. Croce, J. Opt. (Paris) 10, 141 (1979).
[CrossRef]

P. Croce, J. Opt. (Paris) 12, 163 (1981).
[CrossRef]

J. Opt. Soc. Am.

Nouv. Rev. Opt.

P. Croce, L. Prod’homme, Nouv. Rev. Opt. 7, 121 (1976).
[CrossRef]

Opt. Acta

A. Roger, Opt. Acta 30, 575 (1983).
[CrossRef]

Opt. Eng.

C. K. Carniglia, Opt. Eng. 18, 104 (March–April1979).
[CrossRef]

Phys. Rev.

L. G. Parratt, Phys. Rev. 95, 359 (1954).
[CrossRef]

Phys. Thin Films

J. M. Eastman, “Scattering by ALL Dielectric Multilayer Band-Pass Filters and Mirrors for Lasers,” Phys. Thin Films 10, 000 (1978).

Proc. Soc. Photo-Opt. Instrum. Eng.

A. K. Hagenlocher, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 118 (1981).

J. C. Rife, J. F. Osantowski, Proc. Soc. Photo-Opt. Instrum. Eng. 315, 103 (1981).

J. P. Henry, E. Spiller, M. Weisskopf, Proc. Soc. Photo-Opt. Instrum. Eng. 316, 166 (1981).

Rev. Phys. Appl.

L. Nevot, P. Croce, Rev. Phys. Appl. 15, 761 (1980).
[CrossRef]

Other

P. Beckmann, A. Spizzichino, The scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, New York, 1963).

Y. Lepetre, L. Nevot, B. Vidal, in Proceedings, Fourth International Conference on Plasmas, CIP 82, Nice, France13–17 Sept. 1982.

T. W. Barbee, in Proceedings, Topical Conference on Low Energy X-Ray Diagnostics (American Institute of Physics, New York, 1980).

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