Abstract

An ac ellipsometer has been designed and built to study the feasibility of ellipsometric measurement of gradient-index profiles. Faraday effect polarization modulation and a phase-locking detection system are used to monitor spatial changes in index of refraction while absolute index of refraction is determined through simple ellipsometric procedures. This technique is found to be viable for measurement of commonly encountered refractive-index gradients in both glass and infrared transmitting materials.

© 1984 Optical Society of America

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  1. L. G. Atkinson, S. N. Houde-Walter, D. T. Moore, D. P. Ryan, J. M. Stagaman, Appl. Opt. 21, 993 (1982).
    [CrossRef] [PubMed]
  2. J. D. Forer, S. N. Houde-Walter, J. J. Miceli, D. T. Moore, M. J. Nadeau, D. P. Ryan, J. M. Stagaman, N. J. Sullo, Appl. Opt. 22, 407, (1983).
    [CrossRef] [PubMed]
  3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).
  4. J. Monin, G. A. Boutry, Nouv. Rev. Opt. 4, 159 (1973).
    [CrossRef]
  5. H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
    [CrossRef]
  6. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), pp. 619–620.
  7. W. A. Shurcliff, Polarized Light (Harvard U.P.Cambridge, 1962).
  8. D. C. Leiner, D. T. Moore, Rev. Sci. Instrum. 49, 1701 (1978).
    [CrossRef]
  9. G. W. Johnson, D. C. Leiner, D. T. Moore, Opt. Eng. 18, 46 (1979).
    [CrossRef]

1983 (1)

1982 (1)

1979 (1)

G. W. Johnson, D. C. Leiner, D. T. Moore, Opt. Eng. 18, 46 (1979).
[CrossRef]

1978 (1)

D. C. Leiner, D. T. Moore, Rev. Sci. Instrum. 49, 1701 (1978).
[CrossRef]

1974 (1)

H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
[CrossRef]

1973 (1)

J. Monin, G. A. Boutry, Nouv. Rev. Opt. 4, 159 (1973).
[CrossRef]

Atkinson, L. G.

Azzam, R. M. A.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).

Bashara, N. M.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).

Born, M.

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), pp. 619–620.

Boutry, G. A.

J. Monin, G. A. Boutry, Nouv. Rev. Opt. 4, 159 (1973).
[CrossRef]

Forer, J. D.

Houde-Walter, S. N.

Johnson, G. W.

G. W. Johnson, D. C. Leiner, D. T. Moore, Opt. Eng. 18, 46 (1979).
[CrossRef]

Leiner, D. C.

G. W. Johnson, D. C. Leiner, D. T. Moore, Opt. Eng. 18, 46 (1979).
[CrossRef]

D. C. Leiner, D. T. Moore, Rev. Sci. Instrum. 49, 1701 (1978).
[CrossRef]

Mathieu, H. J.

H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
[CrossRef]

McClure, D. E.

H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
[CrossRef]

Miceli, J. J.

Monin, J.

J. Monin, G. A. Boutry, Nouv. Rev. Opt. 4, 159 (1973).
[CrossRef]

Moore, D. T.

Muller, R. H.

H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
[CrossRef]

Nadeau, M. J.

Ryan, D. P.

Shurcliff, W. A.

W. A. Shurcliff, Polarized Light (Harvard U.P.Cambridge, 1962).

Stagaman, J. M.

Sullo, N. J.

Wolf, E.

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), pp. 619–620.

Appl. Opt. (2)

Nouv. Rev. Opt. (1)

J. Monin, G. A. Boutry, Nouv. Rev. Opt. 4, 159 (1973).
[CrossRef]

Opt. Eng. (1)

G. W. Johnson, D. C. Leiner, D. T. Moore, Opt. Eng. 18, 46 (1979).
[CrossRef]

Rev. Sci. Instrum. (2)

H. J. Mathieu, D. E. McClure, R. H. Muller, Rev. Sci. Instrum. 45, 798 (1974).
[CrossRef]

D. C. Leiner, D. T. Moore, Rev. Sci. Instrum. 49, 1701 (1978).
[CrossRef]

Other (3)

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980), pp. 619–620.

W. A. Shurcliff, Polarized Light (Harvard U.P.Cambridge, 1962).

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