Abstract

A micro-Fresnel lens 2 mm in diameter with an F/No. of 1 has been designed and fabricated by ultraviolet lithography. Experimental results show that the fabricated lens has diffraction-limited focusing characteristics and 38% diffraction efficiency.

© 1984 Optical Society of America

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References

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  1. C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).
  2. M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
    [CrossRef]
  3. A. Engel, G. Herziger, Appl. Opt. 12, 471 (1973).
    [CrossRef] [PubMed]
  4. T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
    [CrossRef]
  5. R. Magnusson, T. K. Gayload, J. Opt. Soc. Am. 68, 806 (1978).
    [CrossRef]

1981 (3)

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
[CrossRef]

T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
[CrossRef]

1978 (1)

1973 (1)

Engel, A.

Fujita, T.

T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
[CrossRef]

Gayload, T. K.

Hasegawa, K.

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Herziger, G.

Iga, K.

M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
[CrossRef]

Kojima, C.

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Koyama, J.

T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
[CrossRef]

Magnusson, R.

Miyahara, K.

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Nishihara, H.

T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
[CrossRef]

Oikawa, M.

M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
[CrossRef]

Ooki, H.

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Otobe, T.

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Sanada, T.

M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
[CrossRef]

Appl. Opt. (1)

J. Opt. Soc. Am. (1)

Jpn. J. Appl. Phys. (1)

M. Oikawa, K. Iga, T. Sanada, Jpn. J. Appl. Phys. 20, L51 (1981).
[CrossRef]

Jpn. J. Appl. Phys. Suppl. (1)

C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, H. Ooki, Jpn. J. Appl. Phys. Suppl. 20-1, 199 (1981).

Opt. Lett. (1)

T. Fujita, H. Nishihara, J. Koyama, Opt. Lett. 6, 623 (1981).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Geometry for the design of the micro-Fresnel lens.

Fig. 2
Fig. 2

Fabrication process of the micro-Fresnel lens Using UV lithography.

Fig. 3
Fig. 3

Zone width of the photo mask: (a) central region, (b) near the edge of the mask.

Fig. 4
Fig. 4

Photograph of the micro-Fresnel lens.

Fig. 5
Fig. 5

SEM photographs of the Fresnel lens: (a) central region, (b) enlarged view near the edge of the lens, minimum zone width of 0.87 μm.

Fig. 6
Fig. 6

Schematic diagram for measuring the intensity distribution in the focal plane.

Fig. 7
Fig. 7

Experimental intensity distribution in the focal plane.

Tables (1)

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Table I Design Parameters of the Micro-Fresnel Lens

Equations (4)

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2 π / λ · [ d / cos θ 1 + n t / cos θ 2 - ( d + n t ) ] = k π ,
sin θ 1 = n sin θ 2 .
r k = d tan θ 1 + t tan θ 2 .
d p = λ / 2 ( n p - 1 ) ,

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