Abstract

In this paper we describe fabricating YIG magnetooptic rib waveguides. We experimented with two types of the waveguide: the normal and the inverted rib. The normal rib guide was easy to make; however, the desired profile of the guide structure was not achieved for the inverted rib guide because of YIG’s uniform nucleation in the plane of the grooved substrate.

© 1984 Optical Society of America

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References

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  1. W. K. Burns, P. H. Klein, E. J. West, in Technical Digest, Second International Conference on Integrated Optics and Optical Fiber Communication (Koninklijk Instituut van Ingenieurs, Amsterdam, 1979), paper 21.1.
  2. M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).
  3. J. C. Shelton, F. R. Reinhart, R. A. Logan, Appl. Opt. 17, 890 (1978).
    [CrossRef] [PubMed]
  4. I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
    [CrossRef]
  5. R. C. Alferness, R. V. Schmidt, E. H. Turner, Appl. Opt. 18, 4012 (1979).
    [CrossRef] [PubMed]
  6. F. J. Loenberger, Opt. Lett. 5, 312 (1980).
    [CrossRef]
  7. Y. Okamura, T. Negami, S. Yamamoto, Appl. Opt. to be submitted.
  8. K. Ando, S. Tsukahara, Jpn. J. Appl. Phys. 21, L347 (1982).
    [CrossRef]
  9. Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
    [CrossRef]
  10. Y. Okamura, M. Watanabe, S. Yamamoto, Electron. Lett. to be submitted.
  11. P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
    [CrossRef]
  12. W. L. Bongianni, L. Young, in Proceedings, IEEE International Microwave Symposium (IEEE, New York, 1979), p. 414.
  13. J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
    [CrossRef]
  14. M. J. Adams, An Introduction to Optical Waveguides (Wiley, New York, 1981), Chap. 6.
  15. K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).
  16. T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
    [CrossRef]

1983 (1)

Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
[CrossRef]

1982 (1)

K. Ando, S. Tsukahara, Jpn. J. Appl. Phys. 21, L347 (1982).
[CrossRef]

1980 (1)

1979 (2)

R. C. Alferness, R. V. Schmidt, E. H. Turner, Appl. Opt. 18, 4012 (1979).
[CrossRef] [PubMed]

M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).

1978 (2)

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

J. C. Shelton, F. R. Reinhart, R. A. Logan, Appl. Opt. 17, 890 (1978).
[CrossRef] [PubMed]

1975 (2)

J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
[CrossRef]

I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
[CrossRef]

1972 (1)

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

1969 (1)

P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Adam, J. D.

J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
[CrossRef]

Adams, M. J.

M. J. Adams, An Introduction to Optical Waveguides (Wiley, New York, 1981), Chap. 6.

Aiki, K.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Alferness, R. C.

Ando, K.

K. Ando, S. Tsukahara, Jpn. J. Appl. Phys. 21, L347 (1982).
[CrossRef]

Bongianni, W. L.

W. L. Bongianni, L. Young, in Proceedings, IEEE International Microwave Symposium (IEEE, New York, 1979), p. 414.

Burns, W. K.

W. K. Burns, P. H. Klein, E. J. West, in Technical Digest, Second International Conference on Integrated Optics and Optical Fiber Communication (Koninklijk Instituut van Ingenieurs, Amsterdam, 1979), paper 21.1.

Chinone, N.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Collins, J. H.

J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
[CrossRef]

Hirota, S.

M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).

Ito, R.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Izawa, T.

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Kaminow, I. P.

I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
[CrossRef]

Kawabe, M.

M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).

Klein, P. H.

W. K. Burns, P. H. Klein, E. J. West, in Technical Digest, Second International Conference on Integrated Optics and Optical Fiber Communication (Koninklijk Instituut van Ingenieurs, Amsterdam, 1979), paper 21.1.

Kuroda, T.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Loenberger, F. J.

Logan, R. A.

Maeda, M.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Martine, R. J.

P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Nakagome, H.

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Nakamura, M.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Nakamura, T.

Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
[CrossRef]

Namba, S.

M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).

Negami, T.

Y. Okamura, T. Negami, S. Yamamoto, Appl. Opt. to be submitted.

Okamura, Y.

Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
[CrossRef]

Y. Okamura, T. Negami, S. Yamamoto, Appl. Opt. to be submitted.

Y. Okamura, M. Watanabe, S. Yamamoto, Electron. Lett. to be submitted.

Owens, J. M.

J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
[CrossRef]

Reinhart, F. R.

Schmidt, R. V.

Shelton, J. C.

Stultz, L. W.

I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
[CrossRef]

Tien, P. K.

P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Tsukahara, S.

K. Ando, S. Tsukahara, Jpn. J. Appl. Phys. 21, L347 (1982).
[CrossRef]

Turner, E. H.

R. C. Alferness, R. V. Schmidt, E. H. Turner, Appl. Opt. 18, 4012 (1979).
[CrossRef] [PubMed]

I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
[CrossRef]

Ulrich, R.

P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Umeda, J.

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

Watanabe, M.

Y. Okamura, M. Watanabe, S. Yamamoto, Electron. Lett. to be submitted.

West, E. J.

W. K. Burns, P. H. Klein, E. J. West, in Technical Digest, Second International Conference on Integrated Optics and Optical Fiber Communication (Koninklijk Instituut van Ingenieurs, Amsterdam, 1979), paper 21.1.

Yamamoto, S.

Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
[CrossRef]

Y. Okamura, M. Watanabe, S. Yamamoto, Electron. Lett. to be submitted.

Y. Okamura, T. Negami, S. Yamamoto, Appl. Opt. to be submitted.

Young, L.

W. L. Bongianni, L. Young, in Proceedings, IEEE International Microwave Symposium (IEEE, New York, 1979), p. 414.

Appl. Opt. (2)

Appl. Phys. Lett. (3)

I. P. Kaminow, L. W. Stultz, E. H. Turner, Appl. Phys. Lett. 27, 555 (1975).
[CrossRef]

P. K. Tien, R. Ulrich, R. J. Martine, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

IEEE J. Quantum Electron. (1)

K. Aiki, M. Nakamura, T. Kuroda, J. Umeda, R. Ito, N. Chinone, M. Maeda, IEEE J. Quantum Electron. QE-14, 86 (1978).

IEEE Trans. Circuits Syst. (1)

M. Kawabe, S. Hirota, S. Namba, IEEE Trans. Circuits Syst. CAS-26, 1103 (1979).

Jpn. J. Appl. Phys. (2)

K. Ando, S. Tsukahara, Jpn. J. Appl. Phys. 21, L347 (1982).
[CrossRef]

Y. Okamura, T. Nakamura, S. Yamamoto, Jpn. J. Appl. Phys. 22, 1400 (1983).
[CrossRef]

Opt. Lett. (1)

Radio Electron. Eng. (1)

J. D. Adam, J. H. Collins, J. M. Owens, Radio Electron. Eng. 45, 738 (1975).
[CrossRef]

Other (5)

M. J. Adams, An Introduction to Optical Waveguides (Wiley, New York, 1981), Chap. 6.

W. L. Bongianni, L. Young, in Proceedings, IEEE International Microwave Symposium (IEEE, New York, 1979), p. 414.

Y. Okamura, T. Negami, S. Yamamoto, Appl. Opt. to be submitted.

Y. Okamura, M. Watanabe, S. Yamamoto, Electron. Lett. to be submitted.

W. K. Burns, P. H. Klein, E. J. West, in Technical Digest, Second International Conference on Integrated Optics and Optical Fiber Communication (Koninklijk Instituut van Ingenieurs, Amsterdam, 1979), paper 21.1.

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Figures (5)

Fig. 1
Fig. 1

Chemically etched triangularlike profile obtained on (111) oriented GGG film which indicates overetching.

Fig. 2
Fig. 2

Diagram of processing steps in producing normal rib optical waveguides in YIG by ion-beam sputtering.

Fig. 3
Fig. 3

SEM photograph of cross section and guide part of the YIG rib waveguide.

Fig. 4
Fig. 4

Fabrication process of inverted rib waveguide in YIG by ion milling.

Fig. 5
Fig. 5

SEM photograph of cross section and guide part of the YIG inverted rib waveguide.

Tables (1)

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Table I Etch Rate of Materials Used in the YIG Channel Waveguide

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