Abstract

An optical noncontact profilometer that combines features of other instruments of this type is described. Three measurement ranges are possible. A resolution of ∼2 nm over a 1-μm range is experimentally demonstrated. The mathematical description of the method, based on the theory of the Gaussian laser beam, gives a simple analytical form that allows convenient application and optimization over a wide range. Validity of the theory is experimentally verified.

© 1983 Optical Society of America

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