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References

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  1. J. R. Hollahan, R. S. Rosier, “Plasma Deposition of Inorganic thin films,” in Thin Film Processes, J. L. Vossen, W. Kern, Eds. (Academic, New York, 1978).
    [CrossRef]
  2. E. P. G. T. van de Ven, Solid State Technol. 24, No. 4, 167 (1981).
  3. W. Stutius, W. Streifer, Appl. Opt. 16, 3218 (1977).
    [CrossRef] [PubMed]
  4. P. K. Tien, Appl. Opt. 10, 2395 (1971).
    [CrossRef] [PubMed]

1981 (1)

E. P. G. T. van de Ven, Solid State Technol. 24, No. 4, 167 (1981).

1977 (1)

1971 (1)

Hollahan, J. R.

J. R. Hollahan, R. S. Rosier, “Plasma Deposition of Inorganic thin films,” in Thin Film Processes, J. L. Vossen, W. Kern, Eds. (Academic, New York, 1978).
[CrossRef]

Rosier, R. S.

J. R. Hollahan, R. S. Rosier, “Plasma Deposition of Inorganic thin films,” in Thin Film Processes, J. L. Vossen, W. Kern, Eds. (Academic, New York, 1978).
[CrossRef]

Streifer, W.

Stutius, W.

Tien, P. K.

van de Ven, E. P. G. T.

E. P. G. T. van de Ven, Solid State Technol. 24, No. 4, 167 (1981).

Appl. Opt. (2)

Solid State Technol. (1)

E. P. G. T. van de Ven, Solid State Technol. 24, No. 4, 167 (1981).

Other (1)

J. R. Hollahan, R. S. Rosier, “Plasma Deposition of Inorganic thin films,” in Thin Film Processes, J. L. Vossen, W. Kern, Eds. (Academic, New York, 1978).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Schematic of the prism coupling in Si3N4 waveguide.

Fig. 2
Fig. 2

He–Ne laser light propagating in Si3N4 waveguide.

Fig. 3
Fig. 3

Waveguide loss measurement.

Tables (1)

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Table I Experimental and Theoretical neff Values

Equations (1)

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n eff = n p sin θ p sin 1 sin Ψ n p ,

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