Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Ion-beam-assisted deposition of thin films

Not Accessible

Your library or personal account may give you access

Abstract

Some effects on the properties of electron-beam evaporated thin films produced by ion bombardment of the growing film are reported. Substantial increases in the packing densities of SiO2, TiO2, and ZrO2 films have been produced as measured by the reduction in the adsorption of moisture when the films are exposed to a humid atmosphere. In a ZrO2–SiO2 multilayer interference filter, changes in the wavelength of the peak transmittance on exposure to the atmosphere have been reduced from 8 nm for films deposited without ion bombardment to <1 nm for ion-beam-assisted films.

© 1983 Optical Society of America

Full Article  |  PDF Article
More Like This
Properties of CeO2 thin films prepared by oxygen-ion-assisted deposition

Roger P. Netterfield, W. G. Sainty, P. J. Martin, and S. H. Sie
Appl. Opt. 24(14) 2267-2272 (1985)

Ion-assisted deposition of lanthanum fluoride thin films

James D. Targove, John P. Lehan, Linda J. Lingg, H. Angus Macleod, J. A. Leavitt, and L. C. Mclntyre
Appl. Opt. 26(17) 3733-3737 (1987)

Ion bombardment-induced retarded moisture adsorption in optical thin films

Steven G. Saxe, M. J. Messerly, Bertrand Bovard, Lewis DeSandre, Fred J. Van Milligen, and H. A. Macleod
Appl. Opt. 23(20) 3633-3637 (1984)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved