Abstract

An interferometric method for the analysis of thin films is extended to the IR region. The method consists of the illumination of the sample from both sides by two coherent beams and the comparative inspection of two outgoing beams. The variation of the emerging beams induced by a relative phase variation of the incoming beams provides adequate information for determination of the thickness, refractive index, and absorption coefficient of a single layer.

© 1982 Optical Society of America

Automatic determination of the optical constants of inhomogeneous thin films

J. P. Borgogno, B. Lazarides, and E. Pelletier
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Phase-conjugate interferometric analysis of thin films

Elaine R. Parshall and Mark Cronin-Golomb
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Technique for the study of surface roughness of thin films

K. Truszkowska and M. Jose-Yacaman
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Optical parameters of partially transmitting thin films. 2: Experiment and further analysis of a novel method for their determination

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Precision in the ellipsometric determination of the optical constants of very thin films

G. Vuye and T. López-Ríos
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