Abstract

Planar technology has been used to make a microlens array monolithically. By selectively diffusing a dopant into the planar substrate a distributed-index planar microlens has been realized. The monomer exchange technique for the plastic substrate and ion exchange and electromigration techniques for the glass substrate are used. In particular a 2-D planar microlens array was fabricated in a glass substrate. Each microlens was 1.2 mm in diameter and the focal length was 9.4 mm. The focused spot of the collimated He–Ne laser beam was as small as 17 μmϕ.

© 1982 Optical Society of America

Ray traces in a distributed-index planar microlens

Kenichi Iga, Masahiro Oikawa, and Junichi Banno
Appl. Opt. 21(19) 3451-3455 (1982)

Distributed-index planar microlens and stacked planar optics: a review of progress

K. Iga and S. Misawa
Appl. Opt. 25(19) 3388-3396 (1986)

Distributed-index formation process in a planar microlens

Masahiro Oikawa, Kenichi Iga, Motoyasu Morinaga, Tetsuo Usui, and Takashi Chiba
Appl. Opt. 23(11) 1787-1789 (1984)

Stacked planar optics: an application of the planar microlens

Kenichi Iga, Masahiro Oikawa, S. Misawa, Junichi Banno, and Y. Kokubun
Appl. Opt. 21(19) 3456-3460 (1982)

Index profile simulation for a planar microlens by electromigration

Xiaofan Zhu, Hiroyuki Sugiyama, and Kenichi Iga
Appl. Opt. 28(20) 4429-4431 (1989)