Abstract

Planar technology has been used to make a microlens array monolithically. By selectively diffusing a dopant into the planar substrate a distributed-index planar microlens has been realized. The monomer exchange technique for the plastic substrate and ion exchange and electromigration techniques for the glass substrate are used. In particular a 2-D planar microlens array was fabricated in a glass substrate. Each microlens was 1.2 mm in diameter and the focal length was 9.4 mm. The focused spot of the collimated He–Ne laser beam was as small as 17 μmϕ.

© 1982 Optical Society of America

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  1. K. Iga, Appl. Opt. 19, 1039 (1980).
    [CrossRef] [PubMed]
  2. M. Saruwatari, T. Sugie, Electron. Lett. 16, 955 (1980).
    [CrossRef]
  3. J. Crank, The Mathematics of Diffusion (Clarendon, Oxford, 1975).
  4. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).
  5. T. Imamura, Physics and Green’s Function (wanami, Tokyo, 1978), in Japanese.
  6. E. W. Marchand, Gradient Index Optics (Academic, New York, 1978).
  7. Y. Ohtsuka, Appl. Phys. Lett. 23, 247 (1973).
    [CrossRef]
  8. K. Iga, K. Yokomori, T. Sakayori, Appl. Phys. Lett. 26, 578 (1975).
    [CrossRef]
  9. K. Iga, N. Yamamoto, Appl. Opt. 16, 1305 (1977).
    [CrossRef] [PubMed]
  10. I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).
  11. H. Kawanishi, Y. Suematsu, Trans. IECE Jpn. E60, 231 (1977).
  12. J. Koyama, H. Nishihara, Opto-Electronics Engineering (Corona, Tokyo, 1978), in Japanese.
  13. T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
    [CrossRef]

1980 (2)

M. Saruwatari, T. Sugie, Electron. Lett. 16, 955 (1980).
[CrossRef]

K. Iga, Appl. Opt. 19, 1039 (1980).
[CrossRef] [PubMed]

1977 (2)

K. Iga, N. Yamamoto, Appl. Opt. 16, 1305 (1977).
[CrossRef] [PubMed]

H. Kawanishi, Y. Suematsu, Trans. IECE Jpn. E60, 231 (1977).

1975 (1)

K. Iga, K. Yokomori, T. Sakayori, Appl. Phys. Lett. 26, 578 (1975).
[CrossRef]

1973 (1)

Y. Ohtsuka, Appl. Phys. Lett. 23, 247 (1973).
[CrossRef]

1972 (1)

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Born, M.

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

Crank, J.

J. Crank, The Mathematics of Diffusion (Clarendon, Oxford, 1975).

Furukawa, M.

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

Iga, K.

Imamura, T.

T. Imamura, Physics and Green’s Function (wanami, Tokyo, 1978), in Japanese.

Izawa, T.

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Kawanishi, H.

H. Kawanishi, Y. Suematsu, Trans. IECE Jpn. E60, 231 (1977).

Kitano, I.

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

Koizumi, K.

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

Koyama, J.

J. Koyama, H. Nishihara, Opto-Electronics Engineering (Corona, Tokyo, 1978), in Japanese.

Marchand, E. W.

E. W. Marchand, Gradient Index Optics (Academic, New York, 1978).

Matsumura, H.

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

Nakagome, H.

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Nishihara, H.

J. Koyama, H. Nishihara, Opto-Electronics Engineering (Corona, Tokyo, 1978), in Japanese.

Ohtsuka, Y.

Y. Ohtsuka, Appl. Phys. Lett. 23, 247 (1973).
[CrossRef]

Sakayori, T.

K. Iga, K. Yokomori, T. Sakayori, Appl. Phys. Lett. 26, 578 (1975).
[CrossRef]

Saruwatari, M.

M. Saruwatari, T. Sugie, Electron. Lett. 16, 955 (1980).
[CrossRef]

Suematsu, Y.

H. Kawanishi, Y. Suematsu, Trans. IECE Jpn. E60, 231 (1977).

Sugie, T.

M. Saruwatari, T. Sugie, Electron. Lett. 16, 955 (1980).
[CrossRef]

Uchida, T.

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

Wolf, E.

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

Yamamoto, N.

Yokomori, K.

K. Iga, K. Yokomori, T. Sakayori, Appl. Phys. Lett. 26, 578 (1975).
[CrossRef]

Appl. Opt. (2)

Appl. Phys. Lett. (3)

Y. Ohtsuka, Appl. Phys. Lett. 23, 247 (1973).
[CrossRef]

K. Iga, K. Yokomori, T. Sakayori, Appl. Phys. Lett. 26, 578 (1975).
[CrossRef]

T. Izawa, H. Nakagome, Appl. Phys. Lett. 21, 584 (1972).
[CrossRef]

Electron. Lett. (1)

M. Saruwatari, T. Sugie, Electron. Lett. 16, 955 (1980).
[CrossRef]

Trans. IECE Jpn. (1)

H. Kawanishi, Y. Suematsu, Trans. IECE Jpn. E60, 231 (1977).

Other (6)

J. Koyama, H. Nishihara, Opto-Electronics Engineering (Corona, Tokyo, 1978), in Japanese.

J. Crank, The Mathematics of Diffusion (Clarendon, Oxford, 1975).

M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975).

T. Imamura, Physics and Green’s Function (wanami, Tokyo, 1978), in Japanese.

E. W. Marchand, Gradient Index Optics (Academic, New York, 1978).

I. Kitano, K. Koizumi, H. Matsumura, T. Uchida, M. Furukawa, in Proceedings, First Conference Solid State DevicesTokyo, 1969); O. Buturi, J. Jpn. Soc. Appl. Phys. Suppl. 39, 63 (1970).

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