Abstract

The refractive index of a layer is a sensitive function of the preparation conditions. Normal incidence measurement of the optical properties can reveal possible inhomogeneity of index. We propose a method of automatic determination of the complex refractive index and thickness of a layer which includes systematic measurement of the degree of inhomogeneity which is represented by a simple model. The usefulness of the technique is demonstrated by examples that form part of an experimental study of a number of useful optical materials including Y2O3, TiO2, MgF2, HfO2, and SiO2. The dispersions of the refractive index, the extinction coefficient, and of the inhomogeneity are represented by Cauchy formulas with accurately determined coefficients. The results can therefore be readily used in computing the optical properties of thin-film multilayers.

© 1982 Optical Society of America

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References

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  1. H. A. Macleod, Thin Film Optical Filters (Hilger, London, 1969).
  2. H. L. Liddell, Computer Aided Techniques for the Design of Multilayer Filters (Hilger, London, 1981); A. L. Bloom, Appl. Opt. 20, 66 (1981).
  3. H. A. Macleod, Appl. Opt. 20, 82 (1981); P. Bousquet, E. Pelletier, Thin Solid Films 77, 165 (1981).
    [CrossRef] [PubMed]
  4. E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
    [CrossRef]
  5. M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
    [CrossRef]
  6. H. K. Pulker, Appl. Opt. 18, 1969 (1979).
    [CrossRef] [PubMed]
  7. S. Ogura, PhD Thesis, Newcastle-upon-Tyne (1975).
  8. F. Abeles, Prog. Opt. 2, 251 (1963).
  9. R. Jacobsson, Phys. Thin Films, 8, 51 (1975).
  10. P. Jacquinot, Rev. Opt. Theor. Instrum. 21, 15 (1942).
  11. A. Vasicek, J. Phys. Rad. 11, 342 (1950).
    [CrossRef]
  12. P. H. Berning, Phys. Thin Films 1, 69 (1963).
  13. C. M. Horwitz, Appl. Opt. 17, 1771 (1978).
    [CrossRef] [PubMed]
  14. J. A. Nelder, R. MeadComput. J. 7, 308 (1965).
    [CrossRef]
  15. P. Borgogno, B. Lazarides, P. Roche, Thin Solid Films (1982), to be published.
  16. J. P. Borgogno, P. Bousquet, F. Flory, B. Lazarides, E. Pelletier, P. Roche, Appl. Opt. 20, 90 (1981); D. Smith, P. Baumeister, Appl. Opt. 18, 111 (1979).
    [CrossRef] [PubMed]
  17. H. K. Pulker, G. Paesold, E. Ritter, Appl. Opt. 15, 2986 (1976).
    [CrossRef] [PubMed]

1981

1979

H. K. Pulker, Appl. Opt. 18, 1969 (1979).
[CrossRef] [PubMed]

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

1978

1976

H. K. Pulker, G. Paesold, E. Ritter, Appl. Opt. 15, 2986 (1976).
[CrossRef] [PubMed]

E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
[CrossRef]

1975

R. Jacobsson, Phys. Thin Films, 8, 51 (1975).

1965

J. A. Nelder, R. MeadComput. J. 7, 308 (1965).
[CrossRef]

1963

P. H. Berning, Phys. Thin Films 1, 69 (1963).

F. Abeles, Prog. Opt. 2, 251 (1963).

1950

A. Vasicek, J. Phys. Rad. 11, 342 (1950).
[CrossRef]

1942

P. Jacquinot, Rev. Opt. Theor. Instrum. 21, 15 (1942).

Abeles, F.

F. Abeles, Prog. Opt. 2, 251 (1963).

Berning, P. H.

P. H. Berning, Phys. Thin Films 1, 69 (1963).

Borgogno, J. P.

Borgogno, P.

P. Borgogno, B. Lazarides, P. Roche, Thin Solid Films (1982), to be published.

Bousquet, P.

Flory, F.

Harris, M.

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

Horwitz, C. M.

Jacobsson, R.

R. Jacobsson, Phys. Thin Films, 8, 51 (1975).

Jacquinot, P.

P. Jacquinot, Rev. Opt. Theor. Instrum. 21, 15 (1942).

Lazarides, B.

Liddell, H. L.

H. L. Liddell, Computer Aided Techniques for the Design of Multilayer Filters (Hilger, London, 1981); A. L. Bloom, Appl. Opt. 20, 66 (1981).

Macleod, H. A.

H. A. Macleod, Appl. Opt. 20, 82 (1981); P. Bousquet, E. Pelletier, Thin Solid Films 77, 165 (1981).
[CrossRef] [PubMed]

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

H. A. Macleod, Thin Film Optical Filters (Hilger, London, 1969).

Mead, R.

J. A. Nelder, R. MeadComput. J. 7, 308 (1965).
[CrossRef]

Nelder, J. A.

J. A. Nelder, R. MeadComput. J. 7, 308 (1965).
[CrossRef]

Ogura, S.

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

S. Ogura, PhD Thesis, Newcastle-upon-Tyne (1975).

Paesold, G.

Pelletier, E.

J. P. Borgogno, P. Bousquet, F. Flory, B. Lazarides, E. Pelletier, P. Roche, Appl. Opt. 20, 90 (1981); D. Smith, P. Baumeister, Appl. Opt. 18, 111 (1979).
[CrossRef] [PubMed]

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
[CrossRef]

Pulker, H. K.

Ritter, E.

Roche, P.

J. P. Borgogno, P. Bousquet, F. Flory, B. Lazarides, E. Pelletier, P. Roche, Appl. Opt. 20, 90 (1981); D. Smith, P. Baumeister, Appl. Opt. 18, 111 (1979).
[CrossRef] [PubMed]

E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
[CrossRef]

P. Borgogno, B. Lazarides, P. Roche, Thin Solid Films (1982), to be published.

Vasicek, A.

A. Vasicek, J. Phys. Rad. 11, 342 (1950).
[CrossRef]

Vidal, B.

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
[CrossRef]

Appl. Opt.

Comput. J.

J. A. Nelder, R. MeadComput. J. 7, 308 (1965).
[CrossRef]

J. Phys. Rad.

A. Vasicek, J. Phys. Rad. 11, 342 (1950).
[CrossRef]

Nouv. Rev. Opt.

E. Pelletier, P. Roche, B. Vidal, Nouv. Rev. Opt. 7, 353 (1976).
[CrossRef]

Phys. Thin Films

P. H. Berning, Phys. Thin Films 1, 69 (1963).

R. Jacobsson, Phys. Thin Films, 8, 51 (1975).

Prog. Opt.

F. Abeles, Prog. Opt. 2, 251 (1963).

Rev. Opt. Theor. Instrum.

P. Jacquinot, Rev. Opt. Theor. Instrum. 21, 15 (1942).

Thin Solid Films

M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, B. Vidal, Thin Solid Films 57, 173 (1979).
[CrossRef]

Other

S. Ogura, PhD Thesis, Newcastle-upon-Tyne (1975).

H. A. Macleod, Thin Film Optical Filters (Hilger, London, 1969).

H. L. Liddell, Computer Aided Techniques for the Design of Multilayer Filters (Hilger, London, 1981); A. L. Bloom, Appl. Opt. 20, 66 (1981).

P. Borgogno, B. Lazarides, P. Roche, Thin Solid Films (1982), to be published.

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