Scandium oxide has proved to be a damage-resistant high-index material in laser coatings for use at 248 nm. The results of damage threshold measurements on laser reflectors and antireflection coatings of various designs, material combinations, and deposition temperatures are presented. The most significant effects are observed for overcoat layers on high reflectors and undercoat layers on antireflection coatings. Thresholds >6 J/cm2 for 20 nsec pulses were observed in both cases.
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