Abstract

New laser interferometry has been developed for determination of thickness distributions of low absorbing films on transparent substrates. This technique is suitable for films with either a gradual change or a step change in thickness. With this technique we have obtained fringe patterns showing the 2-D thickness distribution of Se films. This technique is simple and nondestructive without involving computations for films with low absorption and substrates transparent to the laser beam.

© 1982 Optical Society of America

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References

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  1. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), Chap. 7.
  2. A. M. Goodman, Appl. Opt. 17, 2779 (1978).
    [CrossRef] [PubMed]
  3. L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
    [CrossRef]
  4. T. Mishima, K. C. Kao, Appl. Opt. 21, 1101 (1982).
    [CrossRef] [PubMed]
  5. T. Mishima, K. C. Kao, Appl. Opt. 20, 3719 (1981).
    [CrossRef] [PubMed]
  6. H. Adachi, K. C. Kao, J. Appl. Phys. 51, 6326 (1980).
    [CrossRef]

1982 (1)

1981 (1)

1980 (2)

H. Adachi, K. C. Kao, J. Appl. Phys. 51, 6326 (1980).
[CrossRef]

L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
[CrossRef]

1978 (1)

Adachi, H.

H. Adachi, K. C. Kao, J. Appl. Phys. 51, 6326 (1980).
[CrossRef]

Born, M.

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), Chap. 7.

Fisher, L. R.

L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
[CrossRef]

Goodman, A. M.

Kao, K. C.

Mishima, T.

Parker, N. S.

L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
[CrossRef]

Sharples, F.

L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
[CrossRef]

Wolf, E.

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), Chap. 7.

Appl. Opt. (3)

J. Appl. Phys. (1)

H. Adachi, K. C. Kao, J. Appl. Phys. 51, 6326 (1980).
[CrossRef]

Opt. Eng. (1)

L. R. Fisher, N. S. Parker, F. Sharples, Opt. Eng. 19, 798 (1980).
[CrossRef]

Other (1)

M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), Chap. 7.

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Figures (4)

Fig. 1
Fig. 1

Three different methods for formation of fringes: (A) fringes of equal inclination; (B) Fizeau fringes; and (C) fringes by laser interferometry. QML, quasi-monochromatic light; CCL, collimated coherent light; F, thin film; S, substrate; L, lens; d, film thickness; , angle between two interfaces of the film.

Fig. 2
Fig. 2

Schematic diagram of experimental setup and light paths: LS, He–Ne laser; LP, linear polarizer; B, beam expander; L, lens; F, thin film; S, substrate; E, environment.

Fig. 3
Fig. 3

Typical fringe pattern for a Se film deposited on a glass substrate.

Fig. 4
Fig. 4

Film thickness d as a function of position in the y direction at x1 and x2 for a Se film deposited on a glass substrate: ●, measured by new laser interferometry; △, measured from side I; and □, measured from side II by scanning electron microscope.

Equations (4)

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δ = [ ( 4 π ) / λ ] n 1 d cos ϕ 1 ,
tan ϕ 0 = n 2 / n 0 ,
Δ d = λ 2 n 1 [ 1 - ( n 0 n 2 ) 2 ( n 1 n 2 ) 2 + ( n 1 n 0 ) 2 ] - 1 / 2 .
Δ d < λ 2 ( n 1 2 - 1 ) - 1 / 2

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