Abstract

A comparison of radiometric properties, e.g., time structure, source size, reproducibility, and time-integrated relative spectral radiance of a laser-produced plasma and a BRV-source plasma, is described. At normal incidence the laser-produced plasma proved superior to the BRV-source plasma in every aspect concerning its use as a radiometric transfer standard. Reproducibility in spectral radiance within 5% from shot to shot has been achieved with the laser-produced plasma.

© 1982 Optical Society of America

BRV-continuum source as a radiometric transfer standard between 40 nm and 600 nm

M. Kühne, D. Stuck, and E. Tegeler
Appl. Opt. 21(21) 3919-3922 (1982)

Spectral radiant power measurements of VUV and soft x-ray sources using the electron storage ring BESSY as a radiometric standard source

J. Fischer, M. Kühne, and B. Wende
Appl. Opt. 23(23) 4252-4260 (1984)

Far uv absolute intensity measurement: calibration of the BRV source by an ion chamber

V. Kumar, J. M. Esteva, and M. Bon
Appl. Opt. 15(7) 1856-1859 (1976)

High current hollow cathode as a radiometric transfer standard source for the extreme vacuum ultraviolet

Karsten Danzmann, Mathias Günther, Joachim Fischer, Manfred Kock, and Michael Kühne
Appl. Opt. 27(23) 4947-4951 (1988)

Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography

Michael Kühne and Hans-Christian Petzold
Appl. Opt. 27(18) 3926-3932 (1988)