Abstract

A new optical technique for the determination of spatial distributions of the thickness and the optical constants of thin films is proposed. This technique is simple and nondestructive involving mainly an ellipsometer and a coherent light source, and no contact to the thin-film samples is required. A theoretical estimation indicates that this technique may provide a spatial resolution close to the diffraction-limited resolution under certain conditions. Possible applications of this technique are also discussed.

© 1981 Optical Society of America

Full Article  |  PDF Article
More Like This
Determination of the optical constants and thickness of thin films on slightly absorbing substrates

Rusli and G. A. J. Amaratunga
Appl. Opt. 34(34) 7914-7924 (1995)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (11)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription