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Extreme ultraviolet transmission grating monochromator

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Abstract

A compact monochromator has been designed to utilize recently developed free-standing XUV transmission gratings. Tests using a condensed spark source of far UV radiation show that this monochromator, with 20-μm slits, is capable of 0.08-nm resolution at 30 nm in the first order. A physical description of the system and test results are presented.

© 1981 Optical Society of America

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