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Experimental arrangement of ion beam mill, optical monitor, and optical sample.
Reflection vs wavelength characteristics at 45° angle of incidence of two three-layer antireflection coatings.
Reflection vs time characteristics of two coatings being ion beam milled; current density at film surface is 0.25 mA/cm2. (a) Film 1 is centered at ∼λ0 = 525 nm, and (b) Film 2 is centered at ∼λ0 = 485 nm.