Abstract
A surface profiling instrument is described which produces digitized surface
profiles and other statistical data. Sharp styli are available that can give
height resolution of the order of 1–2 Å and lateral resolution
of a few tenths of a micrometer on smooth surfaces. The stylus loading can be
adjusted so that no permanent marks are left on the surface. Representative
surface profiles and autocovariance functions are shown for various materials,
and roughnesses measured with the instrument are compared with values obtained
using other techniques.
© 1981 Optical Society of America
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