High frequency plane gratings (3500 and 3600 gr/mm) have been holographically ruled and blazed for the VUV spectral region. All gratings were coated with 70 nm Al + 25 nm MgF2. Absolute unpolarized and S-and P-plane polarization efficiencies have been measured for the first and second orders in the 120- to 450-nm spectral region at 18.5 and 30° angles of deviation. For deep grooves, anomalous features are more pronounced for the P-plane polarization efficiency than for the S-plane polarization efficiency. Holographic gratings can be tailored to produce high polarization or low polarization in the VUV. For comparison, efficiencies and polarization of the best conventional high frequency gratings were also determined. Measurements show that scattered light is significantly lower for holographic gratings in the VUV when compared with the conventional gratings.
© 1981 Optical Society of AmericaFull Article | PDF Article
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