Abstract

The theory of a holographically prepared grating on a cylindrical surface has been developed, applicable in near normal incidence, in a convergent beam of light, and in transmission in the objective mode, for the design of EUV spectroscopic systems. The design parameters have been calculated for a grating with minimum astigmatism for the entire wavelength range up to 50 nm and zero astigmatism at one wavelength in this region. Coma-type aberration and resolution at various wavelengths have also been estimated with these design parameters.

© 1981 Optical Society of America

Holographic cylindrical grating for cosmic x-ray and XUV spectroscopy in grazing incidence

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