Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Chemical–mechanical polishing of low-scatter optical surfaces

Not Accessible

Your library or personal account may give you access

Abstract

Chemical–mechanical polishing experiments produced optical-quality low-scatter surfaces on single-crystal silicon. An alkaline silica hydrosol slurry and preconditioned pitch laps generated high-quality optically flat surfaces after several hours of polishing. The best results produced a λ/34 peak-to-peak surface having a 6-Å rms surface roughness using bowl-feed polishing and a persuader plate.

© 1980 Optical Society of America

Full Article  |  PDF Article
More Like This
Polishing study using Teflon and pitch laps to produce flat and supersmooth surfaces

Achim J. Leistner, Eric G. Thwaite, Frank Lesha, and Jean M. Bennett
Appl. Opt. 31(10) 1472-1482 (1992)

Monitoring of the glazing state of the pitch polishing lap by an image texture analysis method in full-aperture continuous polishing

Defeng Liao, Ruiqing Xie, Shijie Zhao, and Qiao Xu
Appl. Opt. 62(17) 4551-4556 (2023)

Characterization of wet pad surface in chemical mechanical polishing (CMP) process with full-field optical coherence tomography (FF-OCT)

Woo June Choi, Sung Pyo Jung, Jun Geun Shin, Danning Yang, and Byeong Ha Lee
Opt. Express 19(14) 13343-13350 (2011)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (1)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved