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  1. J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).
  2. J. J. Carroll, A. J. Melmed, Surf. Sci. 16, 251 (1969).
    [CrossRef]
  3. A. J. Melmed, J. J. Carroll, J. Vac. Sci. Technol. 10, 164 (1973).
    [CrossRef]
  4. F. L. McCrackin, “A Fortran Program for Analysis of Ellipsometer Measurements,” Natl. Bur. Stand. U.S. Tech. Note 479 (1969).
  5. Modifications of the computer program, Ref. 4, made by F. L. McCrackin.

1973 (1)

A. J. Melmed, J. J. Carroll, J. Vac. Sci. Technol. 10, 164 (1973).
[CrossRef]

1969 (1)

J. J. Carroll, A. J. Melmed, Surf. Sci. 16, 251 (1969).
[CrossRef]

Carroll, J. J.

A. J. Melmed, J. J. Carroll, J. Vac. Sci. Technol. 10, 164 (1973).
[CrossRef]

J. J. Carroll, A. J. Melmed, Surf. Sci. 16, 251 (1969).
[CrossRef]

J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).

Madey, T. E.

J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).

McCrackin, F. L.

F. L. McCrackin, “A Fortran Program for Analysis of Ellipsometer Measurements,” Natl. Bur. Stand. U.S. Tech. Note 479 (1969).

Melmed, A. J.

A. J. Melmed, J. J. Carroll, J. Vac. Sci. Technol. 10, 164 (1973).
[CrossRef]

J. J. Carroll, A. J. Melmed, Surf. Sci. 16, 251 (1969).
[CrossRef]

J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).

Saridstrom, D. R.

J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).

J. Vac. Sci. Technol. (1)

A. J. Melmed, J. J. Carroll, J. Vac. Sci. Technol. 10, 164 (1973).
[CrossRef]

Surf. Sci. (1)

J. J. Carroll, A. J. Melmed, Surf. Sci. 16, 251 (1969).
[CrossRef]

Other (3)

J. J. Carroll, T. E. Madey, A. J. Melmed, D. R. Saridstrom, in Proceedings of the Fourth International Conference on Ellipsometry to be published in Surf. Sci., 96, August (1980).

F. L. McCrackin, “A Fortran Program for Analysis of Ellipsometer Measurements,” Natl. Bur. Stand. U.S. Tech. Note 479 (1969).

Modifications of the computer program, Ref. 4, made by F. L. McCrackin.

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Figures (2)

Fig. 1
Fig. 1

Plot of d Δ / d d ̅ , d ψ / d d ̅ in n,κ-space of 0.1-nm thick films on a ( 11 2 ̅ 0 ) ruthenium specimen, n ̂ = 2.78 ( 1 i 1.78 ), in vacuum using 546.1-nm wavelength light at 70° angle of incidence. The sensitivity limits for Δ and ψ are 0.01° and 0.005°, respectively. Symbol ao-19-11-1735-i001 means that d Δ / d d ̅ , increases (↑) and d ψ / d d ̅ decreases (↓): +↓↓, □↑↑, Δ↓↑, X ¯ 0, ao-19-11-1735-i002↑0, ⋄0↓, and X0↑, where 0 indicates changes ≤ the assigned sensitivities of Δ or ψ. No symbol near (complex) refractive indices of substrate and medium indicates that d Δ / d d ̅ , d ψ / d d ̅ values are ≤ the assigned sensitivities of Δ and ψ.

Fig. 2
Fig. 2

Plot of d Δ / d d ̅ , d ψ / d d ̅ in n,κ-space of 0.1-nm thick films on a (011) tungsten specimen, n ̂ = 3.61 ( 1 i 0.80 ), in vacuum using 480.0-nm wavelength light at 70° angle of incidence. The sensitivity limits for Δ and ψ are 0.02° and 0.01°, respectively. Same symbol meanings as in Fig. 1.

Equations (1)

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d Δ d d ̅ Δ final Δ initial d ̅ final d ̅ initial . d ψ d d ̅ ψ final ψ initial d ̅ final d ̅ initial .

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