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Real-time digital heterodyne interferometry: a system

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Abstract

A system for obtaining real-time optical path difference maps is described. Results of applications to characterize thermally driven optical phenomena and active optical components are presented. Demonstrated performance parameters include a serial data acquisition rate of 50-μsec/point, spatial resolution to 500 points/line, and phase accuracy of λ/70.

© 1980 Optical Society of America

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