Abstract

Scanning-electron-microscope-written gratings in amorphous chalcogenide thin films have interesting and promising characteristics as guided-wave optical components. As a first trial to demonstrate their use in integrated optics, we have designed and fabricated the gratings for deflecting and splitting the guided waves and experimentally confirmed their excellent optical performance of high efficiency and wide acceptance angle.

© 1979 Optical Society of America

Direct writing of optical gratings using a scanning electron microscope

H. Nishihara, Y. Handa, T. Suhara, and J. Koyama
Appl. Opt. 17(15) 2342-2345 (1978)

Microgratings for high-efficiency guided-beam deflection fabricated by electron-beam direct-writing techniques

Y. Handa, T. Suhara, H. Nishihara, and J. Koyama
Appl. Opt. 19(16) 2842-2847 (1980)

Waveguiding properties of (Se,S)-based chalcogenide glass films and some applications to optical waveguide devices

Sakae Zembutsu and Shuzo Fukunishi
Appl. Opt. 18(3) 393-399 (1979)

Nonoxide Chalcogenide Glass Films for Integrated Optics

R. K. Watts, M. de Wit, and W. C. Holton
Appl. Opt. 13(10) 2329-2332 (1974)

Gratings for Integrated Optics by Electron Lithography

J. C. Tracy, L. F. Thompson, R. D. Heidenreich, and J. L. Merz
Appl. Opt. 13(7) 1695-1702 (1974)