Abstract

Techniques used to fabricate titanium in-diffused optical waveguide devices in LiNbO₃ are described. The processes described include photolithography, precision mask orientation and registration, metal diffusion, waveguide end polishing, and crystal cleaving.

© 1979 Optical Society of America

Optical properties of titanium-diffused LiNbO₃ strip waveguides and their coupling-to-a-fiber characteristics

Masaharu Fukuma and Juichi Noda
Appl. Opt. 19(4) 591-597 (1980)

Fabrication and characterization of titanium-indiffused proton-exchanged optical waveguides in Y-LiNbO₃

A. L. Dawar, S. M. Al-Shukri, R. M. De La Rue, A. C. G. Nutt, and G. Stewart
Appl. Opt. 25(9) 1495-1498 (1986)

Design calculations for directional couplers fabricated by Ti-diffused LiNbO₃ waveguides

Juichi Noda, Masaharu Fukuma, and Osamu Mikami
Appl. Opt. 20(13) 2284-2290 (1981)

Coupling of fibers to Ti-diffused LiNbO₃ waveguides by butt-joining

J. C. Campbell
Appl. Opt. 18(12) 2037-2040 (1979)

Mode control of Ti-diffused LiNbO₃ slab optical waveguide

H. Naitoh, M. Nunoshita, and T. Nakayama
Appl. Opt. 16(9) 2546-2549 (1977)