Abstract

Direct coupling of light from fibers supported in preferentially etched grooves on a silicon surface to channel waveguides formed in the same grooves is demonstrated. Criteria are presented for choosing a groove geometry that matches the center of the fiber to the center of the waveguide and thereby yielding optimum coupling. Channel waveguide tapering and integration of detectors into the channel waveguide termination are demonstrated. A general configuration allowing CCD time multiplexing is introduced.

© 1978 Optical Society of America

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References

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  1. J. T. Boyd, C. L. Chen, Appl. Opt. 15, 1389 (1976).
    [CrossRef] [PubMed]
  2. C. L. Chen, J. T. Boyd, in Proceedings of the Conference on Charge Coupled Device Technology and Applications (NASA, Washington,D.C., 1976), p. 120.
  3. J. T. Boyd, C. L. Chen, IEEE J. Quantum Electron. QE-13, 282 (1977).
    [CrossRef]
  4. G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
    [CrossRef]
  5. D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
    [CrossRef]
  6. T. Tamir, Integrated Optics, (Springer-Verlag, Berlin, 1975).
  7. D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).
  8. J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
    [CrossRef]
  9. C. H. Bulmer, M. G. F. Wilson, in Digest of Topical Meeting on Integrated Optics III, Salt Lake City, (Optical Society of America, Washington, D.C., 1976).
  10. L. P. Boivin, Appl. Opt. 13, 391 (1974).
    [CrossRef] [PubMed]
  11. W. T. Tsang, C. C. Tseng, Appl. Opt. 14, 1200 (1975).
    [CrossRef] [PubMed]
  12. J. S. Harper, P. F. Heidrich, Wave Electron. 2, 369 (1976).
  13. D. Marcuse, Bell Syst. Tech. J. 49, 273 (1970).

1977

J. T. Boyd, C. L. Chen, IEEE J. Quantum Electron. QE-13, 282 (1977).
[CrossRef]

G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
[CrossRef]

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

1976

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

J. S. Harper, P. F. Heidrich, Wave Electron. 2, 369 (1976).

J. T. Boyd, C. L. Chen, Appl. Opt. 15, 1389 (1976).
[CrossRef] [PubMed]

1975

W. T. Tsang, C. C. Tseng, Appl. Opt. 14, 1200 (1975).
[CrossRef] [PubMed]

D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).

1974

1970

D. Marcuse, Bell Syst. Tech. J. 49, 273 (1970).

Achutaramayya, G.

D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).

Anderson, D. B.

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

August, R. R.

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

Bartolini, R. A.

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

Boivin, L. P.

Boyd, J. T.

J. T. Boyd, C. L. Chen, IEEE J. Quantum Electron. QE-13, 282 (1977).
[CrossRef]

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

J. T. Boyd, C. L. Chen, Appl. Opt. 15, 1389 (1976).
[CrossRef] [PubMed]

C. L. Chen, J. T. Boyd, in Proceedings of the Conference on Charge Coupled Device Technology and Applications (NASA, Washington,D.C., 1976), p. 120.

Brandt, G. B.

G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
[CrossRef]

Bulmer, C. H.

C. H. Bulmer, M. G. F. Wilson, in Digest of Topical Meeting on Integrated Optics III, Salt Lake City, (Optical Society of America, Washington, D.C., 1976).

Chen, C. L.

J. T. Boyd, C. L. Chen, IEEE J. Quantum Electron. QE-13, 282 (1977).
[CrossRef]

J. T. Boyd, C. L. Chen, Appl. Opt. 15, 1389 (1976).
[CrossRef] [PubMed]

C. L. Chen, J. T. Boyd, in Proceedings of the Conference on Charge Coupled Device Technology and Applications (NASA, Washington,D.C., 1976), p. 120.

Dalgoutte, D. G.

D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).

Gottlieb, M.

G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
[CrossRef]

Hamilton, M. C.

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

Hammer, J. M.

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

Harper, J. S.

J. S. Harper, P. F. Heidrich, Wave Electron. 2, 369 (1976).

Harris, J. H.

D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).

Heidrich, P. F.

J. S. Harper, P. F. Heidrich, Wave Electron. 2, 369 (1976).

Marcuse, D.

D. Marcuse, Bell Syst. Tech. J. 49, 273 (1970).

Marx, G. E.

G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
[CrossRef]

Miller, A.

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

Neil, C. C.

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

Smith, R. B.

D. G. Dalgoutte, R. B. Smith, G. Achutaramayya, J. H. Harris, Appl. Opt. 14, 1869 (1975).

Tamir, T.

T. Tamir, Integrated Optics, (Springer-Verlag, Berlin, 1975).

Tsang, W. T.

Tseng, C. C.

Wilson, M. G. F.

C. H. Bulmer, M. G. F. Wilson, in Digest of Topical Meeting on Integrated Optics III, Salt Lake City, (Optical Society of America, Washington, D.C., 1976).

Appl. Opt.

Appl. Phys. Lett.

J. M. Hammer, R. A. Bartolini, A. Miller, C. C. Neil, Appl. Phys. Lett. 28, 192 (1976).
[CrossRef]

Bell Syst. Tech. J.

D. Marcuse, Bell Syst. Tech. J. 49, 273 (1970).

IEEE J. Quantum Electron.

J. T. Boyd, C. L. Chen, IEEE J. Quantum Electron. QE-13, 282 (1977).
[CrossRef]

D. B. Anderson, J. T. Boyd, M. C. Hamilton, R. R. August, IEEE J. Quantum Electron. QE-13, 268 (1977).
[CrossRef]

IEEE J. Solid-State Circuits

G. E. Marx, M. Gottlieb, G. B. Brandt, IEEE J. Solid-State Circuits SC-12, 10 (1977).
[CrossRef]

Wave Electron.

J. S. Harper, P. F. Heidrich, Wave Electron. 2, 369 (1976).

Other

C. L. Chen, J. T. Boyd, in Proceedings of the Conference on Charge Coupled Device Technology and Applications (NASA, Washington,D.C., 1976), p. 120.

C. H. Bulmer, M. G. F. Wilson, in Digest of Topical Meeting on Integrated Optics III, Salt Lake City, (Optical Society of America, Washington, D.C., 1976).

T. Tamir, Integrated Optics, (Springer-Verlag, Berlin, 1975).

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Figures (4)

Fig. 1
Fig. 1

Fiber-to-channel waveguides coupling structure using a silicon optical waveguide structure.

Fig. 2
Fig. 2

(a) Single fiber coupled to a channel waveguide with a detector integrated into the V-groove termination; (b) several fibers coupled to channel waveguides which abruptly taper to smaller transverse dimension; (c) photomicrograph of reflection of light propagating in the channel waveguide from the detector region.

Fig. 3
Fig. 3

Slowly tapered V-groove showing the disappearance of the flattened bottom of the groove as the groove narrows: (a) straight waveguide; (b) curved section of waveguide.

Fig. 4
Fig. 4

Integrated receiver for fiber bundle incorporating CCD multiplexing.

Equations (1)

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D f = 2 R sin ϕ ( 1 + d 2 R cos ϕ + 0.54 t R ) ,

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