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References

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  1. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).
  2. P. Rouard, P. Bousquet, in Progress in Optics, Vol. 4, E. Wolf, Ed. (North-Holland, Amsterdam, 1965), p. 147.
    [CrossRef]
  3. L. Harris, J. K. Beasley, A. L. Loeb, J. Opt. Soc. Am. 41, 604 (1951).
    [CrossRef]
  4. C. Hilsum, J. Opt. Soc. Am. 44, 188 (1954).
    [CrossRef]
  5. D. Hacman, A. Keutschegger, Optik 4, 391 (1973).
  6. P. H. Berning, in Physics of Thin Films, Vol. 1, G. Hass, Ed. (Academic, New York, 1963), p. 69.
  7. A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].
  8. W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
    [CrossRef]
  9. H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

1977 (1)

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

1973 (1)

D. Hacman, A. Keutschegger, Optik 4, 391 (1973).

1968 (1)

A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].

1954 (1)

1951 (1)

Beasley, J. K.

Berning, P. H.

P. H. Berning, in Physics of Thin Films, Vol. 1, G. Hass, Ed. (Academic, New York, 1963), p. 69.

Bousquet, P.

P. Rouard, P. Bousquet, in Progress in Optics, Vol. 4, E. Wolf, Ed. (North-Holland, Amsterdam, 1965), p. 147.
[CrossRef]

Ginsburg, N.

H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

Hacman, D.

D. Hacman, A. Keutschegger, Optik 4, 391 (1973).

Harris, L.

Heavens, O. S.

O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).

Hilsum, C.

Holm, R. T.

H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

Keutschegger, A.

D. Hacman, A. Keutschegger, Optik 4, 391 (1973).

Loeb, A. L.

Mizgireva, L. P.

A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].

Palik, E. D.

H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

Pliskin, W. A.

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

Potapov, E. V.

A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].

Rakov, A. V.

A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].

Rosenstock, H. B.

H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

Rouard, P.

P. Rouard, P. Bousquet, in Progress in Optics, Vol. 4, E. Wolf, Ed. (North-Holland, Amsterdam, 1965), p. 147.
[CrossRef]

J. Opt. Soc. Am. (2)

J. Vac. Sci. Technol. (1)

W. A. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).
[CrossRef]

Opt. Spektrosk. (1)

A. V. Rakov, E. V. Potapov, L. P. Mizgireva, Opt. Spektrosk. 25, 117 (1968) [Opt. Spectrosc. 25, 59 (1968)].

Optik (1)

D. Hacman, A. Keutschegger, Optik 4, 391 (1973).

Other (4)

P. H. Berning, in Physics of Thin Films, Vol. 1, G. Hass, Ed. (Academic, New York, 1963), p. 69.

O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).

P. Rouard, P. Bousquet, in Progress in Optics, Vol. 4, E. Wolf, Ed. (North-Holland, Amsterdam, 1965), p. 147.
[CrossRef]

H. B. Rosenstock, R. T. Holm, E. D. Palik, N. Ginsburg, NRL Memorandum Report (in press).

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Figures (3)

Fig. 1
Fig. 1

Experimental transmittance Tu and reflectances Ru, Rd of a SiO2 film with thickness l = 0.35 μm on a Si substrate. The spectral resolution is indicated by the vertical bars as 6 cm−1. Note that Ru = Rd at 1000 cm−1 and 1215 cm−1.

Fig. 2
Fig. 2

(a) Calculated and experimental reflectances Ru, Rd of a SiO2 film on a Si substrate at 1075 cm−1 as a function of film thickness l. (b) Calculated and experimental transmittances Tu, Td of a SiO2 film on a Si substrate at 1075 cm−1 as a function of film thickness l. (c) Calculated and experimental transmittances Tu, Td and reflectances Ru, Rd of a SiO2 film on a Si substrate at 1416 cm−1 as a function of film thickness l.

Fig. 3
Fig. 3

A plot of the locus of points Ru = Rd as a function of index of refraction nF and extinction coefficient kF for different film thicknesses l.

Tables (1)

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Table I Optical Constants of Film F and Substrate S

Equations (17)

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t 12 E = 2 n ¯ 1 / ( n ¯ 1 + n ¯ 2 ) ,
r 12 E = ( n ¯ 1 n ¯ 2 ) / ( n ¯ 1 + n ¯ 2 ) ,
t 12 H = t 12 E ,
r 12 H = r 21 E = r 12 E ,
T 12 = 4 Re ( n ¯ 1 n ¯ 2 * ) / | n ¯ 1 + n ¯ 2 | 2 ,
R 12 = | n ¯ 1 n ¯ 2 | 2 / | n ¯ 1 + n ¯ 2 | 2 ,
τ A B = | ξ / Δ | 2 Re ( t A F E t F B E t F A E * t B F E * ) ,
ρ A B = | r A F E + ( ξ 2 r F B E t F A E t A F E / Δ ) | 2 ,
Δ = 1 r F A E r F B E ξ 2 ,
ξ = exp ( 2 π i n ¯ F l / λ ) ,
T u = I T u / I 0 = η τ 1 S T S 1 / D ,
R u = I R u / I 0 = ρ 1 S + ( τ 1 S τ S 1 R S 1 η 2 / D ) ,
D = 1 ρ S 1 R S 1 η 2 ,
η = exp ( α L ) ,
α = 4 π k S / λ ,
T d = I T d / I 0 = η τ S 1 T 1 S / D = T u ,
R d = I R d / I 0 = R 1 S + ( T 1 S T S 1 ρ S 1 η 2 / D ) .

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