Abstract

A method of profile control or measurement using projected fringes is presented. The fringes are dynamically translated over the object, and the phase of the signal picked up at a selected point on the surface is used to determine the depth or the depth error of the profile at this point. The method has the advantage of being contact-free, fast, accurate, and easily automated.

© 1978 Optical Society of America

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References

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  1. J. R. Varner, “Holographic and Moiré Surface Contouring,” in Holographic Nondestructive Testing, R. K. Erf, Ed. (Academic, New York, 1975), p. 105.
  2. P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
    [CrossRef]
  3. B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
    [CrossRef]
  4. M. Idesawa, T. Yatagai, T. Soma, Appl. Opt. 16, 2152 (1977).
    [CrossRef] [PubMed]
  5. T. Tschudi, H. P. Weber, A. Stadler, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.
  6. T. Tschudi, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.
  7. R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
    [CrossRef]
  8. R. Crane, Appl. Opt. 8, 538 (1969).
  9. J. P. Campbell, W. H. Steier, IEEE J. Quantum Electron. QE-7, 450 (1971).
    [CrossRef]
  10. W. H. Stevenson, Appl. Opt. 9, 649 (1970).
    [CrossRef] [PubMed]
  11. C. F. Buhrer, L. R. Bloom, D. H. Baird, Appl. Opt. 2, 839 (1963).
    [CrossRef]

1977 (1)

1975 (2)

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
[CrossRef]

1973 (1)

R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
[CrossRef]

1971 (1)

J. P. Campbell, W. H. Steier, IEEE J. Quantum Electron. QE-7, 450 (1971).
[CrossRef]

1970 (1)

1969 (1)

R. Crane, Appl. Opt. 8, 538 (1969).

1963 (1)

Baird, D. H.

Benoit, P.

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

Bloom, L. R.

Buhrer, C. F.

Campbell, J. P.

J. P. Campbell, W. H. Steier, IEEE J. Quantum Electron. QE-7, 450 (1971).
[CrossRef]

Crane, R.

R. Crane, Appl. Opt. 8, 538 (1969).

Dändliker, R.

R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
[CrossRef]

Dessus, B.

B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
[CrossRef]

Gerardin, J. P.

B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
[CrossRef]

Hormière, J.

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

Idesawa, M.

Ineichen, B.

R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
[CrossRef]

Mathieu, E.

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

Mottier, F. M.

R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
[CrossRef]

Mousselet, P.

B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
[CrossRef]

Soma, T.

Stadler, A.

T. Tschudi, H. P. Weber, A. Stadler, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

Steier, W. H.

J. P. Campbell, W. H. Steier, IEEE J. Quantum Electron. QE-7, 450 (1971).
[CrossRef]

Stevenson, W. H.

Thomas, A.

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

Tschudi, T.

T. Tschudi, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

T. Tschudi, H. P. Weber, A. Stadler, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

Varner, J. R.

J. R. Varner, “Holographic and Moiré Surface Contouring,” in Holographic Nondestructive Testing, R. K. Erf, Ed. (Academic, New York, 1975), p. 105.

Weber, H. P.

T. Tschudi, H. P. Weber, A. Stadler, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

Yatagai, T.

Appl. Opt. (4)

IEEE J. Quantum Electron. (1)

J. P. Campbell, W. H. Steier, IEEE J. Quantum Electron. QE-7, 450 (1971).
[CrossRef]

Nouv. Rev. Opt. (1)

P. Benoit, E. Mathieu, J. Hormière, A. Thomas, Nouv. Rev. Opt. 6, 67 (1975).
[CrossRef]

Opt. Commun. (1)

R. Dändliker, B. Ineichen, F. M. Mottier, Opt. Commun. 9, 412 (1973).
[CrossRef]

Opt. Quantum Electron. (1)

B. Dessus, J. P. Gerardin, P. Mousselet, Opt. Quantum Electron. 7, 15 (1975).
[CrossRef]

Other (3)

T. Tschudi, H. P. Weber, A. Stadler, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

T. Tschudi, 1976, Internal Report, Institute of Appl. Physics, Sidlerstr. 5, Berne, Switzerland.

J. R. Varner, “Holographic and Moiré Surface Contouring,” in Holographic Nondestructive Testing, R. K. Erf, Ed. (Academic, New York, 1975), p. 105.

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Figures (4)

Fig. 1
Fig. 1

Schematic of a system of fringe projection and measurement through a mask. The fringes are translated at speed Vx and the phase at P is a measure of the depth error Δz. (P0 is a reference point.)

Fig. 2
Fig. 2

Calibration curve. Projected fringe frequency: u0 = 3 lines/mm. Projection angle: α = 30°; calibration: Ψ/Δz = 613 ± 6°/mm.

Fig. 3
Fig. 3

Control of machined flat blind hole; comparison of the running fringe method with a classical caliber measurement.

Fig. 4
Fig. 4

Measurement of a profile without a mask: (a) profile and detector position; (b) result of the measurement at discrete surface points. Projected fringe frequency: u0 = 3 lines/cm, calibration: Ψ/Δz = 62.5 ± 2°/mm.

Equations (3)

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p = p 0 cos δ / cos ( α δ ) ,
Δ x = Δ z sin α p / p 0 .
Ψ = 2 π Δ x / p .

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