Abstract

The incorporation of an optical-thickness monitor in the plasma reactor allows the fabrication of well tuned multilayer optical interference coatings, the variety and application range of which is constrained only by the limited number of presently known well characterized plasma polymers. The properties and deposition idiosyncracies of several plasma polymers found useful for optical thin films are discussed, and optical performance data for specific beam splitter and antireflection coating designs fabricated from available materials are presented.

© 1978 Optical Society of America

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References

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  1. M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
    [CrossRef]
  2. H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
    [CrossRef]
  3. P. K. Tien, G. Smolinsky, R. J. Martin, Appl. Opt. 11, 637 (1972).
    [CrossRef] [PubMed]
  4. P. K. Tien, R. J. Martin, G. Smolinsky, Appl. Opt. 12, 1909 (1973).
    [CrossRef] [PubMed]
  5. J. R. Hollahan, T. Wydeven, C. C. Johnson, Appl. Opt. 13, 1844 (1974).
    [CrossRef] [PubMed]
  6. T. Wydeven, R. Kubacki, Appl. Opt. 15, 132 (1976).
    [CrossRef] [PubMed]
  7. T. Wydeven, Appl. Opt. 16, 717 (1977).
    [CrossRef] [PubMed]
  8. M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
    [CrossRef]
  9. R. P. Cargille Laboratories, Inc., 55 Commerce Road, Cedar Grove, N.J. 07009.
  10. M. J. Minot, J. Opt. Soc. Am. 67, 1046 (1977).
    [CrossRef]

1977 (2)

1976 (2)

M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
[CrossRef]

T. Wydeven, R. Kubacki, Appl. Opt. 15, 132 (1976).
[CrossRef] [PubMed]

1974 (2)

J. R. Hollahan, T. Wydeven, C. C. Johnson, Appl. Opt. 13, 1844 (1974).
[CrossRef] [PubMed]

H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
[CrossRef]

1973 (2)

M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
[CrossRef]

P. K. Tien, R. J. Martin, G. Smolinsky, Appl. Opt. 12, 1909 (1973).
[CrossRef] [PubMed]

1972 (1)

Bell, A. T.

H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
[CrossRef]

Biolsi, M. E.

M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
[CrossRef]

Havens, M. R.

M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
[CrossRef]

Hollahan, J. R.

Johnson, C. C.

Kobayaski, H.

H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
[CrossRef]

Kubacki, R.

Martin, R. J.

Mayhan, K. G.

M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
[CrossRef]

Millard, M. M.

M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
[CrossRef]

Minot, M. J.

Pavlath, A. E.

M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
[CrossRef]

Shen, M.

H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
[CrossRef]

Smolinsky, G.

Tien, P. K.

Windle, J. J.

M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
[CrossRef]

Wydeven, T.

Appl. Opt. (5)

J. Appl. Polym. Sci. (1)

M. M. Millard, J. J. Windle, A. E. Pavlath, J. Appl. Polym. Sci. 17, 2501 (1973).
[CrossRef]

J. Macromol. Sci. Chem. (1)

H. Kobayaski, M. Shen, A. T. Bell, J. Macromol. Sci. Chem. 8, 373 (1974).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Vac. Sci. Technol. (1)

M. R. Havens, M. E. Biolsi, K. G. Mayhan, J. Vac. Sci. Technol. 13, 575 (1976).
[CrossRef]

Other (1)

R. P. Cargille Laboratories, Inc., 55 Commerce Road, Cedar Grove, N.J. 07009.

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Figures (5)

Fig. 1
Fig. 1

Plasma reactor.

Fig. 2
Fig. 2

Spectral reflectance of (air)/(HMDS/TIT)3 1/2/(glass).

Fig. 3
Fig. 3

Spectral transmittance of (air)/(HMDS/TIT)3 1/2/(glass).

Fig. 4
Fig. 4

Spectral reflectance of (air)/(HMDS/TET)/(glass).

Fig. 5
Fig. 5

Spectral transmittance of (air)/(HMDS/TET)/(glass).

Equations (4)

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Monomer identification ( forward power ( W ) reflected power ( W ) Negative d-c bias ( V ) reactant pressures ( millitorr ) ) .
HMDS ( 50 40 8 100 125 )
TET ( 50 40 125 3 TET + 5 O 2 )
TIT ( 50 40 125 150 3 TIT + 5 O 2 + 5 H 2 O 85 ° C )

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