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Production de vapeur d’uranium par pulvérisation cathodique dans une cathode creuse: efficacités relatives des gaz Ne, Ar, Kr et concentration à l’état 5 L 6 0

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Abstract

We have investigated the production of uranium vapors in the 5L60 ground state using a sputtering technique. We have also compared the performance of the Ne, Ar, Kr gases as carrier agents. We have found that the krypton gas gives a maximum yield with minimum energy. Finally the density of U vapors has been found to be of the order of 1012 atoms cm−3.

© 1978 Optical Society of America

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