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References

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  1. W. J. Choyke, R. F. Farich, R. A. Hoffman, Appl. Opt. 15, 2006 (1976).
    [CrossRef] [PubMed]
  2. Victor Rehn, J. L. Stanford, A. D. Baer, V. O. Jones, W. J. Choyke, Appl. Opt. 16, 1111 (1977).
    [CrossRef] [PubMed]
  3. By super-smooth we mean a mirror surface with an rms roughness less than 1.0 nm. (CVD) stands for chemical vapor deposition.
  4. A. K. Riegler, T. P. Vogl, Appl. Opt. 5, 1086 (1966).
    [CrossRef]
  5. Photodissociated pump-oil, fatal to normal gratings, may be removed from SiC with an acid wash.

1977 (1)

1976 (1)

1966 (1)

Appl. Opt. (3)

Other (2)

Photodissociated pump-oil, fatal to normal gratings, may be removed from SiC with an acid wash.

By super-smooth we mean a mirror surface with an rms roughness less than 1.0 nm. (CVD) stands for chemical vapor deposition.

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Figures (3)

Fig. 1
Fig. 1

(a) Reflectance of (CVD)–SiC and platinum from 6 eV to 22.5 eV (226.6–55.09 nm). (b) Total scattering spectra for (CVD)–SiC and heavy metal-coated mirrors. For details of the scattering measurements, see Ref. 2.

Fig. 2
Fig. 2

(a) Deuterium lamp spectrum taken with a McPherson 218 Monochromator having Al + MgF2 coated mirrors, (CVD)–SiC 540-g/mm grating, and a sodium salicylate detector. (b) Deuterium lamp spectrum taken with a McPherson 218 Monochromator having Al + MgF2 coated mirrors, Al + MgF2 2400-g/mm grating, and a sodium salicylate detector.

Fig. 3
Fig. 3

Scanning electron micrograph of (CVD)–SiC grating grooves. The bottom of the grooves, appearing as dark areas in the figure, show some surface roughening due to ion milling without angle averaging.

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