Abstract

Silicon nitride (Si3N4) thin film optical waveguides with propagation losses of less than 0.1 dB/cm for the TE0 mode at λ0 = 6328 Å have been successfully grown by low-pressure chemical vapor deposition. Silicon wafers 5 cm in diameter were used as substrates, and the Si3N4 was separated from the substrate by a steam-oxide SiO2 buffer layer. Propagation losses are examined for the various waveguide modes, and their dependence on waveguide parameters and wavelength are discussed and compared with exact calculations. Leakage into the silicon substrate is shown to be a major loss mechanism, especially at longer wavelengths and for higher mode numbers.

© 1977 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Sub-micron silicon nitride waveguide fabrication using conventional optical lithography

Yuewang Huang, Qiancheng Zhao, Lobna Kamyab, Ali Rostami, Filippo Capolino, and Ozdal Boyraz
Opt. Express 23(5) 6780-6786 (2015)

Silicon nitride ridge-type optical waveguides fabricated on oxidized silicon by laser direct writing

Masaji Ohtani and Mitsugu Hanabusa
Appl. Opt. 31(27) 5830-5832 (1992)

Structural and optical properties of silicon oxynitride on silicon planar waveguides

Massimo del Giudice, Franco Bruno, Tito Cicinelli, and Marco Valli
Appl. Opt. 29(24) 3489-3496 (1990)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription