Abstract

An X-Y galvanometer deflection system capable of high precision in a random access mode of operation is described. Beam positional information in digitized form is obtained by employing a Ronchi grating with a sophisticated optical detection scheme. This information is used in a control interface to locate the beam to the required precision. The system is characterized by high accuracy at maximum speed and is designed for operation in a variable environment, with particular attention placed on thermal insensitivity.

© 1976 Optical Society of America

Laser Pattern Generation Using X–Y Beam Deflection

J. Raamot and V. J. Zaleckas
Appl. Opt. 13(5) 1179-1183 (1974)

An Extended Range Galvanometer Deflection Recording System

R. J. Pfister and D. H. Rank
J. Opt. Soc. Am. 32(7) 397-399 (1942)

Remote measurement of distance and thickness using a deflected laser beam

V. Bodlaj and E. Klement
Appl. Opt. 15(6) 1432-1436 (1976)

Real-time high-speed motion blur compensation system based on back-and-forth motion control of galvanometer mirror

Tomohiko Hayakawa, Takanoshin Watanabe, and Masatoshi Ishikawa
Opt. Express 23(25) 31648-31661 (2015)

A Survey of Laser Beam Deflection Techniques

V. J. Fowler and J. Schlafer
Appl. Opt. 5(10) 1675-1682 (1966)