Abstract

A modified Michelson interferometer is described that allows calibration and measurement simultaneously. The method is used to detect displacements down to 1 nm with a time resolution of 40 nsec. These values are close to theoretical resolution limits for the experimental arrangement. The probing beam is fo cused onto the investigated sample, allowing measurements with a lateral resolution of 1.5 μm. The meth od has been applied to investigate the deformation behavior of pulsed diode lasers.

© 1975 Optical Society of America

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