Abstract

Beam deviation in the polarizing elements is identified as a significant source of error in existing ellipsometer alignment procedures. A high precision alignment procedure that eliminates these errors is described. This procedure is less time consuming than previous methods, and its accuracy is comparable to the limit of resolution of the ellipsometer (typically 0.01–0.005°). A further advantage of this procedure is that it provides a precise method for the alignment of specimens and lasers with the ellipsometer.

© 1974 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Geometrically Exact Ellipsometer Alignment

D. E. Aspnes and A. A. Studna
Appl. Opt. 10(5) 1024-1030 (1971)

Beam Deviation Errors in Ellipsometric Measurements; an Analysis

James R. Zeidler, R. B. Kohles, and N. M. Bashara
Appl. Opt. 13(8) 1938-1945 (1974)

In process ellipsometer azimuth angle calibration

J. R. Adams and N. M. Bashara
Appl. Opt. 15(12) 3179-3184 (1976)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription