Abstract

Patterns with optimal autocorrelation functions are sometimes optimal for optical alignment. When the finest gratings that can be resolved exceed those that actually can be used, errors of alignment can be reduced by nearly a factor of 2 by incorporating segments of a grating into the patterns. Under some conditions, resolution of the inspecting device need not limit accuracy of alignment. Bull’s-eye patterns may be optimal for visual alignment.

© 1974 Optical Society of America

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