Abstract

Methods are described for correcting parabolic errors in Fabry-Perot interferometers using evaporated films and an appropriate shutter. Errors of λ/50 can be readily reduced to less than λ/400 over 54-mm apertures (λ ≈ 550 nm).

© 1974 Optical Society of America

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References

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  1. J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
    [CrossRef]
  2. G. Koppelmann, K. Schreck, Optik (Stuttg.) 29, 549 (1969).
  3. I. Hodgkinson, Appl. Opt. 9, 1577 (1970).
    [CrossRef] [PubMed]
  4. G. Otte, J. Sci. Instrum. 42, 911 (1965).
    [CrossRef]
  5. K. H. Behrndt, Transactions 9th American Vacuum Society Symposium (Macmillan, New York, 1962), p. 111.
  6. J. V. Ramsay, Appl. Opt. 8, 569 (1969).
    [CrossRef] [PubMed]
  7. J. V. Ramsay, Appl. Opt. 1, 411 (1962).
    [CrossRef]
  8. J. V. Ramsay, E. G. V. Mugridge, J. Sci. Instrum. 39, 636 (1963).
    [CrossRef]
  9. J. V. Ramsay, R. P. Netterfield, E. G. V. Mugridge, Vacuum (1974). In press.

1970 (2)

J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
[CrossRef]

I. Hodgkinson, Appl. Opt. 9, 1577 (1970).
[CrossRef] [PubMed]

1969 (2)

G. Koppelmann, K. Schreck, Optik (Stuttg.) 29, 549 (1969).

J. V. Ramsay, Appl. Opt. 8, 569 (1969).
[CrossRef] [PubMed]

1965 (1)

G. Otte, J. Sci. Instrum. 42, 911 (1965).
[CrossRef]

1963 (1)

J. V. Ramsay, E. G. V. Mugridge, J. Sci. Instrum. 39, 636 (1963).
[CrossRef]

1962 (1)

Behrndt, K. H.

K. H. Behrndt, Transactions 9th American Vacuum Society Symposium (Macmillan, New York, 1962), p. 111.

Hodgkinson, I.

Kobler, H.

J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
[CrossRef]

Koppelmann, G.

G. Koppelmann, K. Schreck, Optik (Stuttg.) 29, 549 (1969).

Mugridge, E. G. V.

J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
[CrossRef]

J. V. Ramsay, E. G. V. Mugridge, J. Sci. Instrum. 39, 636 (1963).
[CrossRef]

J. V. Ramsay, R. P. Netterfield, E. G. V. Mugridge, Vacuum (1974). In press.

Netterfield, R. P.

J. V. Ramsay, R. P. Netterfield, E. G. V. Mugridge, Vacuum (1974). In press.

Otte, G.

G. Otte, J. Sci. Instrum. 42, 911 (1965).
[CrossRef]

Ramsay, J. V.

J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
[CrossRef]

J. V. Ramsay, Appl. Opt. 8, 569 (1969).
[CrossRef] [PubMed]

J. V. Ramsay, E. G. V. Mugridge, J. Sci. Instrum. 39, 636 (1963).
[CrossRef]

J. V. Ramsay, Appl. Opt. 1, 411 (1962).
[CrossRef]

J. V. Ramsay, R. P. Netterfield, E. G. V. Mugridge, Vacuum (1974). In press.

Schreck, K.

G. Koppelmann, K. Schreck, Optik (Stuttg.) 29, 549 (1969).

Appl. Opt. (3)

J. Sci. Instrum. (2)

J. V. Ramsay, E. G. V. Mugridge, J. Sci. Instrum. 39, 636 (1963).
[CrossRef]

G. Otte, J. Sci. Instrum. 42, 911 (1965).
[CrossRef]

Optik (Stuttg.) (1)

G. Koppelmann, K. Schreck, Optik (Stuttg.) 29, 549 (1969).

Sol. Phys. (1)

J. V. Ramsay, H. Kobler, E. G. V. Mugridge, Sol. Phys. 12, 492 (1970).
[CrossRef]

Other (2)

K. H. Behrndt, Transactions 9th American Vacuum Society Symposium (Macmillan, New York, 1962), p. 111.

J. V. Ramsay, R. P. Netterfield, E. G. V. Mugridge, Vacuum (1974). In press.

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Figures (3)

Fig. 1
Fig. 1

Shutter profiles used with variations in thickness of film attainable; shutter (a) [θ° = 185 − 0.155 (83.8 − R)2 − 3.48 × 10−6 (83.8 − R)4] produces a thickness distribution (a); and shutter (b) [θ° = 45 + 0.155 (83.8 − R)2 − 3.48 × 10−6 (83.8 − R)4] thickness (b), where θ is the included angle of the shutter at a radius R mm. Details of the use of the shutter are given in Ref. 9.

Fig. 2
Fig. 2

The equipment within the vacuum chamber. The rotating substrate holder, the rotating off-set shutter, and the electron gun used for evaporation are clearly shown. The shutter [θ° = 185 − 0.036 (83.8 − R)2 − 3.48 × 10−6 (83.8 − R)4] illustrated is that used to produce extremely uniform thin films; θ is the included angle of the shutter at a radius R mm.

Fig. 3
Fig. 3

Spectral reflectance of the standard 11-layer high reflectance coating used in the interferometers.

Tables (1)

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Table I Finesse as a Function of Wavelength

Equations (3)

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F P = π [ ( 1 R ) 2 / R + k 2 α 2 ] 1 / 2 .
α / λ = [ ( F R 2 F P 2 ) / 4 F R 2 F P 2 ] 1 / 2 .
θ = 1 2 [ K + A ( R R O ) + B ( R R O ) 2 + C ( R R O ) 4 ] ,

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