Abstract

We report the waveguiding properties of sputtered films of three chalcogenide glasses: As2S3, Ge28Sb12Se60, and Ge33As12Se55, at 1.064 μm. Propagation losses of less than 1 dB/cm have been measured for As2S3 films. Delineated guides, as well as films, have been made and studied.

© 1974 Optical Society of America

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References

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  1. A. R. Hilton, Appl. Opt. 5, 1877 (1966).
    [Crossref] [PubMed]
  2. R. D. Maurer, Proc. IEEE 61, 452 (1973).
    [Crossref]
  3. These glasses are sold by Texas Instruments under the number designations 1173 and 20.
  4. P. A. Young, J. Phys. C4, 93 (1971).
  5. J. Jerger, Servo Corp. of America, tech. rept. #ASDTDR-63-552 (1963).
  6. R. J. Patterson, M. J. Brau, Electro. Chem. Soc. Mtg, Cleveland, May, 1966.
  7. N. Uchida, N. Niizeki, Proc. IEEE 61, 1073 (1973).
    [Crossref]
  8. Y. Ohmachi, J. Appl. Phys. 44, 3928 (1973).
    [Crossref]
  9. H. Furuta, N. Noda, A. Ihaya, Appl. Opt. 13, 322 (1974).
    [Crossref] [PubMed]
  10. Compendium on High Power Infrared Laser Window Materials, AFCRL-72-0170, Special Report 135, March9, 1972.
  11. E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
    [Crossref]

1974 (1)

1973 (3)

R. D. Maurer, Proc. IEEE 61, 452 (1973).
[Crossref]

N. Uchida, N. Niizeki, Proc. IEEE 61, 1073 (1973).
[Crossref]

Y. Ohmachi, J. Appl. Phys. 44, 3928 (1973).
[Crossref]

1972 (1)

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

1971 (1)

P. A. Young, J. Phys. C4, 93 (1971).

1966 (1)

Brau, M. J.

R. J. Patterson, M. J. Brau, Electro. Chem. Soc. Mtg, Cleveland, May, 1966.

Furuta, H.

Garmire, E.

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

Hilton, A. R.

Hunsperger, R. G.

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

Ihaya, A.

Jerger, J.

J. Jerger, Servo Corp. of America, tech. rept. #ASDTDR-63-552 (1963).

Maurer, R. D.

R. D. Maurer, Proc. IEEE 61, 452 (1973).
[Crossref]

Niizeki, N.

N. Uchida, N. Niizeki, Proc. IEEE 61, 1073 (1973).
[Crossref]

Noda, N.

Ohmachi, Y.

Y. Ohmachi, J. Appl. Phys. 44, 3928 (1973).
[Crossref]

Patterson, R. J.

R. J. Patterson, M. J. Brau, Electro. Chem. Soc. Mtg, Cleveland, May, 1966.

Stoll, H.

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

Uchida, N.

N. Uchida, N. Niizeki, Proc. IEEE 61, 1073 (1973).
[Crossref]

Yariv, A.

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

Young, P. A.

P. A. Young, J. Phys. C4, 93 (1971).

Appl. Opt. (2)

Appl. Phys. Lett. (1)

E. Garmire, H. Stoll, A. Yariv, R. G. Hunsperger, Appl. Phys. Lett. 21, 87 (1972).
[Crossref]

J. Appl. Phys. (1)

Y. Ohmachi, J. Appl. Phys. 44, 3928 (1973).
[Crossref]

J. Phys. (1)

P. A. Young, J. Phys. C4, 93 (1971).

Proc. IEEE (2)

R. D. Maurer, Proc. IEEE 61, 452 (1973).
[Crossref]

N. Uchida, N. Niizeki, Proc. IEEE 61, 1073 (1973).
[Crossref]

Other (4)

Compendium on High Power Infrared Laser Window Materials, AFCRL-72-0170, Special Report 135, March9, 1972.

These glasses are sold by Texas Instruments under the number designations 1173 and 20.

J. Jerger, Servo Corp. of America, tech. rept. #ASDTDR-63-552 (1963).

R. J. Patterson, M. J. Brau, Electro. Chem. Soc. Mtg, Cleveland, May, 1966.

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Figures (5)

Fig. 1
Fig. 1

Absorption loss of No. 20 and No. 1173 bulk glasses in region near the fundamental absorption edge vs wavelength. The points were obtained by calorimetric measurements, as described in the text.

Fig. 2
Fig. 2

Power coupled out from the TE0 mode of an As2S3 film of thickness 0.72 μm vs propagation distance. The straight line is a least-squares fit to the data. The slope is −2.1 dB/cm.

Fig. 3
Fig. 3

Propagation loss vs mode index m for TEm modes of a No. 1173 film of thickness 0.998 μm. The substrate is borosilicate glass.

Fig. 4
Fig. 4

Dispersion curves for As2S3 films on borosilicate glass. υ is the phase velocity of the guided wave; d is film thickness; λ is the free space wavelength.

Fig. 5
Fig. 5

Scattered light from a wave in a No. 1173 film guided by a curved overlay strip of photoresist. The input coupling prism is at the left. Strip width is 10 μm. Total propagation distance from the prism coupler to the radiating spot at the edge (arrow) is about 1.8 in. (45.7 mm).

Tables (1)

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Table I Refractive Index and Absorption Coefficient of Bulk Glasses

Equations (3)

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Q / E = [ 1 + R exp ( α L ) ] [ 1 exp ( α L ) ] T 1 exp ( α L ) , R = ( n 1 ) 2 / ( n + 1 ) 2 T = 1 R ,
L ( m ) = 3.7 + ( 0.70 ) ( m + 1 ) 2 ,
L ( m , d ) = L 0 + f ( d ) ( m + 1 ) 2 ,

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