Abstract

An interferometric method for testing the accuracy of linear motions, such as that of drilling machines and lathe tools, is described. This method uses a diffraction grating fixed to the carriage to be tested. Only the first-order diffraction terms obtained by illuminating this grating with a laser beam are superimposed on each other by an imaging lens. An interference line pattern results that extends through the space of interfering beams and that can be analyzed with a microscope. Any deviations from the direction of motion, with the exception of deviations parallel to the grating lines, will be indicated by a movement of the fringe pattern and can be determined by counting the number of fringes passing the optical axis of the microscope. An application of this method for testing the chuck guidances in contact printing machines with a measurement accuracy of 0.2 μ is presented.

© 1973 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical Contour Mapping of Surfaces

W. Jaerisch and G. Makosch
Appl. Opt. 12(7) 1552-1557 (1973)

Automated high precision variable aperture for spectrophotometer linearity testing

Joanne C. Zwinkels and D. S. Gignac
Appl. Opt. 30(13) 1678-1687 (1991)

Spectrophotometer Linearity Testing Using the Double-Aperture Method

Klaus D. Mielenz and Ken L. Eckerle
Appl. Opt. 11(10) 2294-2303 (1972)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription