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Electron-Resist Fabrication of Bends and Couplers for Integrated Optical Circuits

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Abstract

The fabrication of complex integrated optical circuits using thin films will require dielectric patterns of high resolution and edge smoothness. This paper describes an electron-beam technique that has been used to form a curved thin-film light guide and a directional coupler, and is applicable to filters and other more complex components.

© 1973 Optical Society of America

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