Abstract

The properties of a Fabry-Perot etalon, with surface defects compensated by irradiating a silicon oxide film, are computed for the case in which the initial surface defects function is rectangular. As a result of absorption, the compensating layer of silicon oxide must be deposited before the reflecting coating if the etalon is to be used at uv wavelengths. For visible wavelengths, the compensating layer may be a half-wave silicon oxide film deposited over the reflecting coating. An example is discussed in which the rms deviation from the mean thickness of an etalon is reduced from 2.37 nm to 0.80 nm. An automatic self-compensating process is proposed in which the radiation transmitted by an etalon may be used to produce an appropriate change in the thickness profile of a silicon oxide film.

© 1972 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription