Abstract

Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Δ and ψ, the angle of incidence φ, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.

© 1971 Optical Society of America

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Figures (3)

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Equations (27)

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