Abstract

A focusing reflectometer for measuring the optical constants of thin films by the () method is described. The focusing reflectometer has a larger effective aperture than typical planar reflectometers, and, unlike planar reflectometers, the illuminated area of the specimen is independent of the angle of incidence. The intensity of the incident light is not measured so the reflectometer is limited to wavelengths where the reflectivity of the specimen varies rapidly with the angle of incidence. Results are given for evaporated gold films in the energy range 6.0 eV to 12.0 eV.

© 1971 Optical Society of America

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References

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  1. W. R. Hunter, J. Opt. Soc. Amer. 55, 1197 (1965).
    [CrossRef]
  2. G. R. Field, E. Murphy, Appl. Opt. 10, Apr. (1971).
    [CrossRef] [PubMed]
  3. R. P. Madden, L. R. Canfield, J. Opt. Soc. Amer. 51, 838 (1961).
    [CrossRef]
  4. L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).
  5. V. G. Horton, E. T. Arakawa, R. N. Hamm, M. W. Williams, Appl. Opt. 8, 667 (1969).
    [CrossRef] [PubMed]

1971 (1)

G. R. Field, E. Murphy, Appl. Opt. 10, Apr. (1971).
[CrossRef] [PubMed]

1969 (1)

1965 (1)

W. R. Hunter, J. Opt. Soc. Amer. 55, 1197 (1965).
[CrossRef]

1964 (1)

L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).

1961 (1)

R. P. Madden, L. R. Canfield, J. Opt. Soc. Amer. 51, 838 (1961).
[CrossRef]

Arakawa, E. T.

Canfield, L. R.

L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).

R. P. Madden, L. R. Canfield, J. Opt. Soc. Amer. 51, 838 (1961).
[CrossRef]

Field, G. R.

G. R. Field, E. Murphy, Appl. Opt. 10, Apr. (1971).
[CrossRef] [PubMed]

Hamm, R. N.

Hass, G.

L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).

Horton, V. G.

Hunter, W. R.

W. R. Hunter, J. Opt. Soc. Amer. 55, 1197 (1965).
[CrossRef]

L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).

Madden, R. P.

R. P. Madden, L. R. Canfield, J. Opt. Soc. Amer. 51, 838 (1961).
[CrossRef]

Murphy, E.

G. R. Field, E. Murphy, Appl. Opt. 10, Apr. (1971).
[CrossRef] [PubMed]

Williams, M. W.

Appl. Opt. (2)

J. Opt. Soc. Amer. (2)

W. R. Hunter, J. Opt. Soc. Amer. 55, 1197 (1965).
[CrossRef]

R. P. Madden, L. R. Canfield, J. Opt. Soc. Amer. 51, 838 (1961).
[CrossRef]

J. Phys. Radium (1)

L. R. Canfield, G. Hass, W. R. Hunter, J. Phys. Radium 25, 124 (1964).

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Figures (5)

Fig. 1
Fig. 1

Diagram showing the exit slit (S), the spherical mirror (M), and the detector (D) on the Rowland circle with center at O. The primed symbols refer to another possible position of the components of the reflectometer.

Fig. 2
Fig. 2

A general diagram of the focusing reflectometer. Arrows indicate the direction of motion of the system. S is the exit slit of the monochromator, M is the spherical mirror, and D is the detector.

Fig. 3
Fig. 3

The focusing reflectometer.

Fig. 4
Fig. 4

Refractive index (n) vs wavelength (Å) for two different gold films. The results of Canfield et al.4 (- - -) and Horton et al.5(. . . . .) are also shown.

Fig. 5
Fig. 5

Extinction coefficient (k) vs wavelength (Å) for two different gold films. The results of Canfield et al.4 (- - -) and Horton et al.5 (. . . . .) are also shown.

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