Abstract

The Michelson interferometer may be used to measure the separation between two parallel surfaces which are distant from the interferometer. A beam of light incident normal to these surfaces must be at least partially reflected back to the interferometer by each surface in order for the technique to work. The results of three measurements using this technique are described, and the effect of dispersion is discussed.

© 1971 Optical Society of America

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References

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  1. P. D. Fochs, J. Opt. Soc. Am. 40, 623 (1950).
    [CrossRef]
  2. M. A. Jeppeson, A. M. Taylor, J. Opt. Soc. Am. 56, 451 (1966).
    [CrossRef]
  3. G. H. Lovins, Appl. Opt. 9, 1935 (1970).
    [PubMed]
  4. H. H. Hopkins, in Advanced Optical Techniques, A. C. S. Van Heel, Ed. (North-Holland, Amsterdam, 1967), pp. 189 ff.
  5. Hewlett Packard Co., model 5525 A laser interferometer.

1970

1966

1950

Fochs, P. D.

Hopkins, H. H.

H. H. Hopkins, in Advanced Optical Techniques, A. C. S. Van Heel, Ed. (North-Holland, Amsterdam, 1967), pp. 189 ff.

Jeppeson, M. A.

Lovins, G. H.

Taylor, A. M.

Appl. Opt.

J. Opt. Soc. Am.

Other

H. H. Hopkins, in Advanced Optical Techniques, A. C. S. Van Heel, Ed. (North-Holland, Amsterdam, 1967), pp. 189 ff.

Hewlett Packard Co., model 5525 A laser interferometer.

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Figures (6)

Fig. 1
Fig. 1

A diagram of the arrangement of the apparatus.

Fig. 2
Fig. 2

The wavefront components reflected from a target with two surfaces as they pass through the interferometer.

Fig. 3
Fig. 3

The expected fringe visibility for a target with two surfaces separated a distance d as a function of the position of mirror M1. The coherence length of the light is L.

Fig. 4
Fig. 4

A cross section of a target. The dimensions are in centimeters.

Fig. 5
Fig. 5

A cross section of the capacitor target. The drawing is not to scale.

Fig. 6
Fig. 6

The white light interference fringes. The arrow indicates the fringe line corresponding to exact path equality.

Equations (6)

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L = λ 0 2 / Δ λ ,
[ 2 a ( Δ λ / λ 0 2 ) ( d n / d λ ) Δ λ ] 2 1 ,
Γ max = exp { - π [ ( a / λ 0 ) ( d n / d λ ) ( Δ λ ) ] 2 } .
[ 2 a ( Δ λ / λ 2 ) ( d n / d λ ) Δ λ ] 2 = 1.65 × 10 - 5
Γ max = 0.42 ,
L = 0.04 cm .

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