Abstract

A laser radar whose resolution is greater than 1 μm is reported. We present the radar results when they are used for such purposes as determining the size of a void inside a silicon wafer, profiling a cross-sectional pattern of an optical fiber, studying the birefringence of a lithium-niobate crystal, or finding a fault in an optical guide in an optical integrated-circuit wafer. Neural-network theory was used in processing the radar signal. Radar processing based on neural-network theory gave significantly superior resolution compared with Fourier-transform-based processing.

© 1994 Optical Society of America

Solid-state laser synthetic aperture radar

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