Variable-diameter beam-shaping system design with high zoom ratio containing aspheric optical components

Wenyi Li; Shili Wei; Shili Wei; Zichao Fan; Zichao Fan; Zhengbo Zhu; Donglin Ma; Donglin Ma; Donglin Ma

doi:10.1364/AO.412307

Applied Optics
Vol. 60,
Issue 3,
pp. 705-713
(2021)
•https://doi.org/10.1364/AO.412307

Variable-diameter beam-shaping system design with high zoom ratio containing aspheric optical components

Wenyi Li, Shili Wei, Zichao Fan, Zhengbo Zhu, and Donglin Ma

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Wenyi Li, Shili Wei, Zichao Fan, Zhengbo Zhu, and Donglin Ma, "Variable-diameter beam-shaping system design with high zoom ratio containing aspheric optical components," Appl. Opt. 60, 705-713 (2021)

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Abstract

Recently, the optical design of refractive beam-shaping systems has been extensively studied, although such study remains focused on two optical surfaces. Designing a beam-shaping system with variable output beam sizes and prescribed irradiance profiles remains a challenging but rewarding task. Here, we present a design framework, including calculation of the initial system and optimization process, to achieve variable-diameter beam-shaping systems with high zoom ratios. We introduce the whole process of designing a compact $8\times $ zoom system of superior optical performance by transforming a Gaussian beam into flat-top beams with different magnifications. We also present a design of a zoom beam-shaping system transforming a Gaussian beam into variable beams with inverse Gaussian distributions to demonstrate the robustness and efficiency of the proposed method.

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Wavelength	248 nm
Lens materials	silica
Refractive index	1.50855
Input Gaussian beam waist	5 mm
Maximum radius of the incident aperture	5 mm
Zoom ratio	$8 \times$
Diameter of flat-top output beam	5–40 mm
Diameter of inverse Gaussian output beam	5–40 mm
Overall length	$\leq 150 m m$
Flat-top beam’s uniformity	$\leq 5 %$
RRMSD of inverse Gaussian beam	$\leq 10 %$

Output Beam Radius (mm)		2.5	3	3.5	5	8	11	14	16	18	20
GO	Uniformity	0.75%	1.09%	1.82%	1.38%	0.80%	0.75%	0.84%	0.62%	1.79%	0.30%
	Edge-steepness	1.24%	1.14%	1.14%	1.20%	1.10%	2.14%	1.08%	1.07%	1.06%	1.05%
	Flatness	98.07%	96.63%	95.62%	96.83%	98.49%	98.66%	98.91%	97.66%	97.54%	99.23%
POP	Uniformity	3.76%	3.03%	3.48%	2.67%	1.52%	3.45%	1.11%	2.64%	3.49%	0.47%
	Edge-steepness	5.99%	5.33%	5.17%	2.96%	3.30%	2.15%	2.12%	2.11%	2.09%	1.55%
	Flatness	98.03%	98.60%	98.11%	83.98%	89.30%	96.76%	93.26%	88.90%	91.57%	95.31%

Surface	Thickness (mm)	2nd order	4th order	6th order	8th order	10th order
S1	4.000	−1.115E-01	2.202E-03	4.109E-05	−1.531E-06	1.758E-08
S2	7.845 (zoom)	−1.471E-01	9.002E-04	3.188E-05	3.060E-07	−1.338E-09
S3	4.000	−1.146E-01	1.767E-04	1.687E-04	−7.115E-06	1.022E-07
S4	16.945 (zoom)	1.525E-02	−1.884E-04	8.379E-05	−1.496E-06	5.955E-09
S5	6.000	2.911E-03	−5.607E-06	−2.657E-08	1.609E-10	−2.584E-13
S6	10.000	−5.653E-03	−5.324E-06	−2.256E-08	1.335E-10	−2.104E-13

Surface	Thickness (mm)	2nd order	4th order	6th order	8th order	10th order
S1	4.000	−1.624E-01	2.853E-03	1.592E-05	−9.422E-07	9.386E-09
S2	27.090 (zoom)	−1.424E-01	2.625E-04	3.103E-05	1.038E-07	−3.522E-09
S3	3.000	−4.841E-01	5.002E-02	−4.363E-03	2.325E-04	−5.107E-06
S4	65.253 (zoom)	−1.774E-01	1.909E-03	9.703E-04	−7.744E-05	2.017E-06
S5	5.200	−2.524E-04	1.679E-05	1.179E-07	−3.302E-10	2.312E-13
S6	10.000	−6.770E-03	9.814E-06	1.755E-07	−4.777E-10	3.555E-13

Wavelength	248 nm
Lens materials	silica
Refractive index	1.50855
Input Gaussian beam waist	5 mm
Maximum radius of the incident aperture	5 mm
Zoom ratio	$8 \times$
Diameter of flat-top output beam	5–40 mm
Diameter of inverse Gaussian output beam	5–40 mm
Overall length	$\leq 150 m m$
Flat-top beam’s uniformity	$\leq 5 %$
RRMSD of inverse Gaussian beam	$\leq 10 %$

Abstract

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Figures (10)

Tables (4)

Equations (7)

Applied Optics