Abstract

On-the-fly remote laser processing plays an increasingly important role in modern fabrication techniques. These processes require guiding of the focus of a laser beam along the contours of the workpiece in three dimensions. State-of-the-art galvanometer scanners already provide highly dynamic and precise transverse $x {-} y$ beam steering. However, longitudinal focus shifting (“z-shifting”) relying on conventional optics is restricted to a bandwidth of a few hundred Hz. We have developed and manufactured a fast piezo-based z-shifting mirror with diffraction-limited surface fidelity providing a focus shift of $\Delta z \gt 60\;{\rm{mm}}$ with an actuation rate of 2 kHz.

© 2020 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription