X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

Y. Ghim and H. Rhee, “Instantaneous thickness measurement of multilayer films by single-shot angle-resolved spectral reflectometry,” Opt. Lett. 44, 5418–5421 (2019).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

J. S. Li, X. X. Lu, Q. N. Zhang, B. B. Li, J. D. Tian, and L. Y. Zhong, “Dual-channel simultaneous spatial and temporal polarization phase-shifting interferometry,” Opt. Express 26, 4392–4400 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

N. T. Shaked, M. T. Rinehart, and A. Wax, “Dual interference channel quantitative phase microscopy of live cell dynamics,” Opt. Lett. 34, 767–769 (2009).

[Crossref]

F. Z. Bai and C. H. Rao, “Phase-shifts n pi/2 calibration method for phase-stepping interferometry,” Opt. Express 17, 16861–16868 (2009).

[Crossref]

Y. F. Chen and Y. L. Du, “One-shot surface profile measurement using polarized phase-shifting,” Proc. SPIE 7511, 328–332 (2009).

[Crossref]

P. J. D. Groot and L. L. Deck, “New algorithms and error analysis for sinusoidal phase shifting interferometry,” Proc. SPIE 7063, 70630K (2008).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, “Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry,” Opt. Commun. 257, 217–224 (2006).

[Crossref]

S. K. Debnath, M. P. Kothiyal, J. Schmit, and P. Hariharan, “Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates,” Opt. Express 14, 4662–4667 (2006).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984).

[Crossref]

W. Cleveland, “Robust locally weighted regression and smoothing scatterplots,” J. Am. Stat. Assoc. 74, 829–836 (1979).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

Y. F. Chen and Y. L. Du, “One-shot surface profile measurement using polarized phase-shifting,” Proc. SPIE 7511, 328–332 (2009).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

W. Cleveland, “Robust locally weighted regression and smoothing scatterplots,” J. Am. Stat. Assoc. 74, 829–836 (1979).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).

[Crossref]

P. J. D. Groot and L. L. Deck, “New algorithms and error analysis for sinusoidal phase shifting interferometry,” Proc. SPIE 7063, 70630K (2008).

[Crossref]

Y. F. Chen and Y. L. Du, “One-shot surface profile measurement using polarized phase-shifting,” Proc. SPIE 7511, 328–332 (2009).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

D. W. Tang, F. Gao, and X. Jiang, “On-line surface inspection using cylindrical lenses based spectral domain low-coherence interferometry,” Appl. Opt. 53, 5510–5516 (2014).

[Crossref]

X. Q. Jiang, K. W. Wang, F. Gao, and H. Muhamedsalih, “Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise,” Appl. Opt. 49, 2903–2909 (2010).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

P. J. D. Groot, “Principles of interference microscopy for the measurement of surface topography,” Adv. Opt. Photon. 7, 1–65 (2015).

[Crossref]

P. J. D. Groot and L. L. Deck, “New algorithms and error analysis for sinusoidal phase shifting interferometry,” Proc. SPIE 7063, 70630K (2008).

[Crossref]

P. J. D. Groot, “Phase-shift calibration errors in interferometers with spherical Fizeau cavities,” Appl. Opt. 34, 2856–2863 (1995).

[Crossref]

P. J. D. Groot, “Phase shifting interferometry,” in Optical Measurement of Surface Topography, R. Leach, ed. (Springer, 2011), Chap. 8, pp. 167–185.

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

A. Hettwer, J. Kranz, and J. Schwider, “Three channel phase-shifting interferometer using polarization-optics and a diffraction grating,” Opt. Eng. 39, 960–966 (2000).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

A. Hettwer, J. Kranz, and J. Schwider, “Three channel phase-shifting interferometer using polarization-optics and a diffraction grating,” Opt. Eng. 39, 960–966 (2000).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).

[Crossref]

A. Hettwer, J. Kranz, and J. Schwider, “Three channel phase-shifting interferometer using polarization-optics and a diffraction grating,” Opt. Eng. 39, 960–966 (2000).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, “Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry,” Opt. Commun. 257, 217–224 (2006).

[Crossref]

R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, “Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry,” Opt. Commun. 257, 217–224 (2006).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, “Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry,” Opt. Commun. 257, 217–224 (2006).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).

[Crossref]

X. Q. Jiang, K. W. Wang, F. Gao, and H. Muhamedsalih, “Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise,” Appl. Opt. 49, 2903–2909 (2010).

[Crossref]

R. L. Guo, B. L. Yao, P. Gao, J. W. Min, J. Han, X. Yu, M. Lei, S. H. Yan, Y. L. Yang, D. Dan, and T. Ye, “Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability,” Appl. Opt. 52, 3484–3489 (2013).

[Crossref]

D. W. Tang, F. Gao, and X. Jiang, “On-line surface inspection using cylindrical lenses based spectral domain low-coherence interferometry,” Appl. Opt. 53, 5510–5516 (2014).

[Crossref]

B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurement of surface topography of magnetic tapes by Mirau interferometry,” Appl. Opt. 24, 1489–1497 (1985).

[Crossref]

A. Harasaki and J. C. Wyant, “Fringe modulation skewing effect in white-light vertical scanning interferometry,” Appl. Opt. 39, 2101–2106 (2000).

[Crossref]

P. J. D. Groot, “Phase-shift calibration errors in interferometers with spherical Fizeau cavities,” Appl. Opt. 34, 2856–2863 (1995).

[Crossref]

A. L. Fymat, “Jones’s matrix representation of optical instruments. I: beam splitters,” Appl. Opt. 10, 2499–2505 (1971).

[Crossref]

M. Novak, J. Millerd, N. Brock, M. North-Morris, J. Hayes, and J. Wyant, “Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer,” Appl. Opt. 44, 6861–6868 (2005).

[Crossref]

W. Cleveland, “Robust locally weighted regression and smoothing scatterplots,” J. Am. Stat. Assoc. 74, 829–836 (1979).

[Crossref]

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan, “Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry,” Opt. Commun. 257, 217–224 (2006).

[Crossref]

P. Hlubina, J. Luňáček, D. Ciprian, and R. Chlebus, “Windowed Fourier transform applied in the wavelength domain to process the spectral interference signals,” Opt. Commun. 281, 2349–2354 (2008).

[Crossref]

A. Hettwer, J. Kranz, and J. Schwider, “Three channel phase-shifting interferometer using polarization-optics and a diffraction grating,” Opt. Eng. 39, 960–966 (2000).

[Crossref]

R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984).

[Crossref]

F. Z. Bai and C. H. Rao, “Phase-shifts n pi/2 calibration method for phase-stepping interferometry,” Opt. Express 17, 16861–16868 (2009).

[Crossref]

J. S. Li, X. X. Lu, Q. N. Zhang, B. B. Li, J. D. Tian, and L. Y. Zhong, “Dual-channel simultaneous spatial and temporal polarization phase-shifting interferometry,” Opt. Express 26, 4392–4400 (2018).

[Crossref]

S. K. Debnath, M. P. Kothiyal, J. Schmit, and P. Hariharan, “Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates,” Opt. Express 14, 4662–4667 (2006).

[Crossref]

X. B. Feng, N. Senin, R. Su, S. Ramasamy, and R. Leach, “Optical measurement of surface topographies with transparent coatings,” Opt. Laser Eng. 121, 261–270 (2019).

[Crossref]

T. Guo, M. H. Li, Y. Zhou, L. F. Ni, X. Fu, and X. T. Hu, “Wavelength correction for thin film measurement in a microscopic white light spectral interferometer,” Optik 145, 188–201 (2017).

[Crossref]

J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, “Pixelated phase-mask dynamic interferometers,” Proc. SPIE 5531, 304–314 (2004).

[Crossref]

Y. Bian, T. Guo, F. Li, S. M. Wang, X. Fu, and X. T. Hu, “Large step structure measurement by using white light interferometry based on adaptive scanning,” Proc. SPIE 8759, 87594T (2013).

[Crossref]

Y. F. Chen and Y. L. Du, “One-shot surface profile measurement using polarized phase-shifting,” Proc. SPIE 7511, 328–332 (2009).

[Crossref]

P. J. D. Groot and L. L. Deck, “New algorithms and error analysis for sinusoidal phase shifting interferometry,” Proc. SPIE 7063, 70630K (2008).

[Crossref]

U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).

[Crossref]

J. D. Weng, T. J. Tao, S. G. Liu, H. L. Ma, X. Wang, C. L. Liu, and H. Tan, “Optical-fiber frequency domain interferometer with nanometer resolution and centimeter measuring range,” Rev. Sci. Instrum. 84, 113103 (2013).

[Crossref]

T. Guo, L. Yuan, Z. Chen, M. H. Li, X. Fu, and X. T. Hu, “Single point Linnik white-light spectral microscopic interferometer for surface measurement,” Surf. Topogr. Metrol. Prop. 6, 034008 (2018).

[Crossref]

P. J. D. Groot, “Phase shifting interferometry,” in Optical Measurement of Surface Topography, R. Leach, ed. (Springer, 2011), Chap. 8, pp. 167–185.