Abstract

In this work, an off-axis digital holographic microscope operating in reflection mode and a telecentric regimen to produce 3D topography of a microscopy sample is shown. The main characteristics of the proposed method, which make it different from the previous works in the field, are the possibility of producing the 3D topography by a single shot over the complete field of view with sensitivity of λ/100, without phase perturbations introduced by the illuminating-imaging system, and with no further numerical processing beyond that required for recovering the phase map of the sample. A complete analysis of the illuminating-imaging system of the digital holographic microscope is presented. The proposed digital holographic microscope is tested on imaging a USAF resolution test target and some micro-electromechanical systems (MEMs).

© 2017 Optical Society of America

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