Millimeter-wave broadband antireflection coatings using laser ablation of subwavelength structures

Tomotake Matsumura; Karl Young; Qi Wen; Shaul Hanany; Hirokazu Ishino; Yuki Inoue; Masashi Hazumi; Jürgen Koch; Oliver Suttman; Viktor Schütz

doi:10.1364/AO.55.003502

Applied Optics
Vol. 55,
Issue 13,
pp. 3502-3509
(2016)
•https://doi.org/10.1364/AO.55.003502

Millimeter-wave broadband antireflection coatings using laser ablation of subwavelength structures

Tomotake Matsumura, Karl Young, Qi Wen, Shaul Hanany, Hirokazu Ishino, Yuki Inoue, Masashi Hazumi, Jürgen Koch, Oliver Suttman, and Viktor Schütz

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Tomotake Matsumura, Karl Young, Qi Wen, Shaul Hanany, Hirokazu Ishino, Yuki Inoue, Masashi Hazumi, Jürgen Koch, Oliver Suttman, and Viktor Schütz, "Millimeter-wave broadband antireflection coatings using laser ablation of subwavelength structures," Appl. Opt. 55, 3502-3509 (2016)

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- Optical Design and Fabrication
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About this Article
History
- Original Manuscript: February 9, 2016
- Revised Manuscript: March 28, 2016
- Manuscript Accepted: March 29, 2016
- Published: April 25, 2016

Abstract

We report on the first use of laser ablation to make submillimeter, broadband, antireflection coatings (ARCs) based on subwavelength structures (SWSs) on alumina and sapphire. We used a 515 nm laser to produce pyramid-shaped structures with a pitch of about 320 μm and a total height of near 800 μm. Transmission measurements between 70 and 140 GHz are in agreement with simulations using electromagnetic propagation software. The simulations indicate that SWS-ARCs with the fabricated shape should have a fractional bandwidth response of $Δ ν / ν_{center} = 0.55$ centered on 235 GHz for which reflections are below 3%. Extension of the bandwidth to both lower and higher frequencies, between a few tens of gigahertz and a few terahertz, should be straightforward with appropriate adjustment of laser ablation parameters.

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		Diameter (mm)	Thickness (mm)	Index^a
Alumina	amorphous; 99.6% pure	42	$2.21 \pm 0.01$	$3.04 \pm 0.02$
Sapphire	c-cut; 99.99% pure	51	$3.832 \pm 0.003$	$3.074 \pm 0.003$

Sample	Height (μm)	Pitch (μm)	Peak Width (μm)
	Designed
All	810	330	60
	Measured^a
Alumina	$790 \pm 60$	$313 \pm 4$	$66 \pm 8$
Sapphire	$715 \pm 24$	$325 \pm 4$	$57 \pm 6$

	$r_{sym}$	${sd}_{x}$ (μm)	${sd}_{y}$ (μm)
Alumina	$1.042 \pm 0.035$	$545 \pm 50$	$525 \pm 25$
Sapphire	$0.950 \pm 0.015$	$500 \pm 10$	$450 \pm 10$

		Diameter (mm)	Thickness (mm)	Index^a
Alumina	amorphous; 99.6% pure	42	$2.21 \pm 0.01$	$3.04 \pm 0.02$
Sapphire	c-cut; 99.99% pure	51	$3.832 \pm 0.003$	$3.074 \pm 0.003$

Sample	Height (μm)	Pitch (μm)	Peak Width (μm)
	Designed
All	810	330	60
	Measured^a
Alumina	$790 \pm 60$	$313 \pm 4$	$66 \pm 8$
Sapphire	$715 \pm 24$	$325 \pm 4$	$57 \pm 6$

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